Patents Represented by Law Firm Snell & Wimer, LLP
  • Patent number: 5938506
    Abstract: The present invention relates generally to a method for conditioning polishing materials that are generally used to polish disks used for magnetic recording. The polishing material is conditioned by moving a conditioning ring relative to the polishing material. More particularly, the conditioning ring is rotated and/or orbited across the surface of the polishing material, so that the material is conditioned. Preferably, the conditioning ring comprises an annular ring of abrasive material fixedly applied to a substantially planar surface of the conditioning ring.
    Type: Grant
    Filed: June 3, 1997
    Date of Patent: August 17, 1999
    Assignee: SpeedFam-IPEC Corporation
    Inventors: Clinton Fruitman, Philbin Scott, Joseph Cesna