Patents Represented by Law Firm Specner, Frank & Schneider
  • Patent number: 5111667
    Abstract: A two-stage cryopump having a refrigerator including a first stage and a second stage being colder than the first stage; a condensation member having a condensation surface; a first coupler for connecting the condensation member to the second stage in a thermally conducting manner; an adsorption member having an adsorption surface and being spaced from the condensation member; and a second coupler for connecting the adsorption member to the second stage in a heat conducting manner. There is further provided a heater for heating the adsorption member during time periods for regenerating the adsorption member. The second coupler is so designed that it thermally sufficiently insulates the adsorption member from the second stage and from the condensation member at least during heating periods of the adsorption member, for preventing heating the condensation member by the heater.
    Type: Grant
    Filed: March 4, 1991
    Date of Patent: May 12, 1992
    Assignee: Leybold AG
    Inventors: Hans-Ulrich Hafner, Hans-Hermann Klein, Uwe Timm