Abstract: An apparatus for exposing a radiation sensitive workpiece to define patterns therein includes an electron gun, a mask with spaced apertures for passing electron radiation, and a radiation deflector-blanker to direct the radiation to selected ones of the apertures and to form separate beamlets from the apertures then demagnify the separate beamlets and direct them onto the workpiece without crossing them. In one embodiment, the groups of apertures are fixed on the mask and define fixed undivided profiles in the path of the radiation.
Type:
Grant
Filed:
April 28, 1993
Date of Patent:
October 3, 1995
Assignee:
Lepton, Inc.
Inventors:
Martin P. Lepselter, Sheldon M. Kugelmass
Abstract: The treatment of water to remove gas vacuolate cyanobacteria is effected by subjecting the water to a predetermined pressure by being pumped down a centrally located pipe in a bore-hole, which is steel lined. This causes the gas vesicles in the cyanobacteria to collapse. The treated water is then stored in a settling tank where the cyanobacteria sink to the bottom and can be removed along with any other sediment in the water. The method can be applied to decrease the amount of cyanobacteria with gas vesicles in a lake or other water impoundment. (FIG.
Type:
Grant
Filed:
July 25, 1991
Date of Patent:
June 6, 1995
Assignees:
East Anglian Water Company, Anthony E. Walsby