Abstract: A magnetron sputter device includes a first target having an emitting surface and a second target having a concave emitting target defined by a side wall of a frustum of cone. Separate plasma discharges for the targets are confined by separate electromagnet derived magnetic fields, coupled to the targets by pole pieces.

Abstract: An aligner for aligning a mask and a wafer during photolithography of a semiconductor chip uses detection of the differential capacitance between two sets of conductive fingers on the mask and ridges on the wafer. An A.C. signal is applied to the ridges and the phase or amplitude of the signals coupled to the two sets of fingers is detected and compared. A shield is positioned between the ridges and the fingers to ensure that coupling occurs only between desired portions of the ridges and the fingers.

Abstract: A sample cavity resonator for NMR spectroscopy contains a pair of diametrically opposed paraxial post structures approximating a single turn inductance about the axially positioned sample. The posts are separately excited in 180 degree relative phases by respective coupling loops spaced between the corresponding post and the cavity wall. A slideable piston structure capacitively couples to the posts and provides cavity tuning.

Abstract: A charged particle beam lithography machine includes a beam source and beam steering and forming elements within an evacuated column. A stage assembly for supporting a semiconductor wafer or mask is positioned in ambient and proximate the exit end of said beam steering and forming elements. A vacuum envelope apparatus is affixed to the exit end of the beam steering and forming elements so that the outer surface or tip of the vacuum envelope apparatus rests in spaced apart, close coupled opposition to the wafer or mask supported on the stage. The vacuum envelope apparatus includes internal structural members which define an internal vacuum processing zone and at least one surrounding intermediate vacuum zone. A graded vacuum seal is formed between the tip of the vacuum envelope and the mask or wafer. The seal extends from the internal vacuum processing zone to the external ambient.

Abstract: A multiple wafer holder generally of the size and shape of a standard wafer has on its front surface a plurality of pockets. The edge of each pocket is generally V-shaped and grooved so that wafers of different sizes can be carried by each holder and more than one wafer can be transported together into the processing chamber of an implanter from a cassette.

Abstract: A linear beam tube has multiple heat pipes formed integrally in the cavity wall between the beam collector and external air cooling fins. The heat pipes use sintered copper pellets on the walls of the pipes as wicks to facilitate the return flow of liquid condensed at the fins. Circumferential channels connect the heat pipes at each end to reduce vapor lock effects. Vapor surface area enhancement rods are used at the heat source to increase the transfer rates of heat into the fluid.

Abstract: A case for holding a wire-wound magnetic core or other electrical component so that the leads can be automatically inserted on a circuit board which employs a base portion that is shaped and dimensioned for compatibility with conventional automatic insertion equipment. The base includes both plastically-deformable cantilever lead traps for mechanically gripping the leads to secure the component on the base as well as circular notches in the slots that define predetermined positions on the base at which to grip the leads to enable use of the case for automatic insertion.

Abstract: Vapor from a boiling cryogenic liquid contained in a cryostat is warmed prior to discharge by passing said vapor through a heat exchanger for transferring heat at ambient temperature to the escaping vapor whereby condensation of atmospheric moisture on the cryostat is minimized.

Abstract: A method relating to deposition of a liquid sample mixture in the tubular furnace of a spectrophotometer. The method involves drawing a quantity of each ingredient of the sample mixture into a conduit in a predetermined sequence and also drawing a slug of air into the conduit immediately following the uptake of each ingredient. In the result, a segmented fluid stream is created in which a slug of air separates each two adjacent ingredient segments. The conduit is initially filled with a rinsing fluid and the segmented fluid stream displaces some of that rinsing fluid from the conduit. A slug of air separates the rinsing fluid from the segmented stream. The segmented stream is then discharged in a single operation into the furnace of the spectrophotometer so that mixing of the ingredients occurs at or adjacent the furnace surface.

Abstract: A baffle divides a housing into first and second compartments. The first compartment includes a chromatography oven having a fan for circulating heated air over the columns while the oven is closed and for sucking ambient temperature cooling air in the first compartment into the oven while the oven is open. Ambient air is sucked into a tortuous path in the first compartment. Cooling air from the second compartment flows into the first compartment via openings in the baffle. The cooling air flows over the oven exterior and is at least partially sucked into the oven by an oven fan while the oven is open. The oven heater, coaxial with the blades, is located between an oven wall and blades. A ring baffle, having approximately the same diameter as and coaxial with the blades, is located between the wall and the blades. A fan outside of the oven sucks air from the oven through an outlet while the oven is open.

Abstract: A liquid sample in a syringe can be injected into a capillary column with inner diameter less than 200 microns without inserting the injection needle of the syringe into the column. The end of a modified injection needle according to this invention has a tubular opening with inner diameter sufficiently large so that the intake end of the column can be inserted inside, thereby establishing an annular duct between the needle and the column. A carrier gas is caused to flow through this duct while the plunger on the syringe is pressed to squeeze the liquid into the needle, thus forcing the liquid into the capillary column.

Abstract: An electron collimation system for electron arc therapy treatments consists of a slit collimation system which is movable with the electron beam applicator and is designed to allow for dose compensation in the sagittal direction and a hoop-and-clamp assembly for final field shaping. By correctly designing the shape of the slit in the former and properly adjusting the components of the latter, it is possible to accomplish quite uniform shielding without causing any weight of the shielding material to rest on the patient.

Abstract: A cathode sputter magnetron device is controlled so that there is a uniformity of material supplied to workpieces over the lives of plural geometrically spaced targets from which material is sputtered. Each target is subjected to a separate plasma discharge that is confined to the associated target by a separate magnetic field. The relative powers of the separate plasma discharges are controlled so that the relative powers change as a function of target erosion condition. The impedances of the separate discharges are controlled by varying each separate magnetic field in response to variable currents applied to electromagnets.

Abstract: A calorimetric load for very high microwave power at very high frequencies is formed by a metallic, cylindrical chamber into which the wave-guide carrying the power opens. Inside the metallic cylinder is a coaxial dielectric cylinder, with a space between full of circulating wave-absorbing fluid such as water. The incoming wave may be in a higher-order mode. To make it disperse rapidly into the absorbing fluid, a conical reflector is located inside the dielectric cylinder to reflect the wave outward.

Abstract: The RF probe of a quadrature sensitive FT-NMR spectrometer is tuned and matched to its electrical environment by utilizing the phase quadrature sensitivity of said spectrometer to function as an impedance vector analyzer for the probe in situ. Phase and amplitude measurements of the in situ probe are compared to an occasionally measured and stored amplitude and phase characteristic observed when the probe is replaced by a 50 ohm terminator.

Abstract: Provided is an apparatus for improving alignment accuracy by distorting in a controlled manner an X-ray lithographic mask to compensate for mask distortions induced primarily by thermally induced clamping effects in E-beam and X-ray exposure systems. A system of additional alignment sensors is used to provide localized misalignment information. This information is then used to provide feedback to a servo system which in turn activates electromechanically translatable clamps which distort the X-ray mask so as to minimize misalignment over the exposure field.

Abstract: A direct contact microwave hyperthermia applicator includes a plurality of rectangular waveguide sections each having a radiating aperture. The waveguide sections are mounted with their long sides abutting. A pair of shutter elements for individually varying the radiating aperture is associated with each of the waveguide sections. The shutters can be adjusted to form a desired composite aperture which produces a radiation pattern adapted for efficient hyperthermia treatment of a tumor having a prescribed size, shape and location. Microwave power supplied to the radiating elements can be varied in phase and power level to further control the radiation pattern.

Abstract: An automatic sputtering apparatus for coating semiconductor wafers uses shuttle wafer carriers and elevators to handle wafers within the apparatus. The wafer carrier has a hole in the center. One side of the wafer carrier is opened, thereby forming a throat in the shuttle wafer carrier in the form of the letter C. The elevator has a cantilevered shaft. The upper part of the shaft of the elevator is centered under the wafer while the lowest part of the cantilevered shaft is under a point outside the wafer carrier. The connecting portion of the shaft passes through the throat of the wafer carrier as the wafer is lifted. Since the lifting portion of the shaft is outside the wafer carrier, the shuttle can move with the elevator in the up position. The pedestal for holding the wafer on the elevator is equipped with arms which project upward at an angle to the horizontal, thereby confining the wafer to a pedestal.

Abstract: A coaxial magnetron has a high-Q resonant cavity surrounding a multiple-resonator anode circuit and coupled by slots to alternate anode resonators. The cavity is resonant in the TE.sub.111 mode, having two zero points of electric field on its periphery. The anode circuit is correspondingly resonant in its N/2-1 mode.Mode suppression means damp out the degenerate TE.sub.111 mode which is not coupled to the output iris.The size and weight of the magnetron are much less than conventional tubes using a cavity resonant in the TE.sub.011 mode with circular electric field.

Abstract: An NMR system for obtaining high resolution spectroscopic measurements at a selected temperature includes gradient correcting means disposed in proximity to an NMR probe, for imposing desired gradients on the volume occupied by the sample within the probe. A heat exchange gas is impelled through a heat exchanger and then surrounds the sample to bring the sample to the desired temperature. A thermal barrier, inocuous to RF excitation and of relatively low magnetic susceptibility protects the gradient correcting means from drift due to heat exchange with the heat exchanging gas.