Patents Represented by Attorney Stanley Z. Coles

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  • System for substrate cooling in an evacuated environment
    Patent number: 5181556
    Abstract: A method and apparatus are disclosed using a combination of convection and conduction cooling to cool an article in an evacuated environment. A processing chamber is used which includes at least one heat sink. A flat surface of the article to be cooled is positioned within the chamber in a spaced apart facing parallel relationship to a facing surface of the heat sink. High conductivity gases are admitted into the chamber to accomplish cooling of the article.
    Type: Grant
    Filed: September 20, 1991
    Date of Patent: January 26, 1993
    Assignee: Intevac, Inc.
    Inventor: John L. Hughes