Patents Represented by Attorney, Agent or Law Firm Stanton Bradan
  • System and method for improved throughput of semiconductor wafer processing
    Patent number: 6464445
    Abstract: A system and method for improved throughput of semiconductor wafer processing. In one aspect, a wafer carrier is provided having a flat zone capable of holding an additional lot of wafers for processing. In addition, a multiple fork wafer transfer mechanism is provided having a plurality of wafer forks for loading and unloading wafers in the wafer carrier at a reduced fork pitch.
    Type: Grant
    Filed: December 19, 2000
    Date of Patent: October 15, 2002
    Assignee: Infineon Technologies Richmond, LP
    Inventors: Brian M. Knapik, David K. Lawson, Gregory O'Lyn Proctor