Abstract: A method for invoking an arbitrary sorting technique in a type-safe way. In one aspect, the method comprises the steps of providing a hierarchical schedule class comprising a schedule float subclass and a sorting schedule float subclass, subsumed by the schedule float subclass. The sorting schedule float subclass, in turn, comprises a schedule attribute class; a filter class; and a pair compare class. The method further includes using the hierarchical schedule class with each of an independent group consisting of a schedule attribute strategy, a filter strategy and a pair compare class strategy.

Abstract: A method and system for optimizing a steady-state performance of a process having multiple inputs and multiple output-responses is provided. The method and system provide a unified and systematic way of optimizing nominal, statistical and multi-criteria performance of the process. The process can be inter alia a semiconductor manufacturing process or a business process.

Abstract: An assembly for measuring a trench depth parameter of a workpiece is disclosed. The assembly has an ultra-violet radiation source; a split fiber bundle having a first branch for propagating the ultra-violet radiation from the radiation source to a lens, and a second branch; a lens for focusing the UV radiation to the workpiece and refocusing an ultra-violet interference signal to the second branch; and a detector responsive to the ultra-violet interference signal received through the second branch. The detector transforms the ultra-violet interference signal to an electrical signal which is a measure of a trench depth of the workpiece. The ultra-violet interference signal is developed when ultra-violet radiation propagates through the workpiece and reflects from its base region to thereby interfere with ultra-violet radiation that is directly reflected by a workpiece surface which is different from the base region.