Patents Represented by Attorney Sterne, Kessler, Goldstein & Fox P.P.L.C
  • Patent number: 7372614
    Abstract: A deformable optical device includes a reflection device having a first reflecting surface and a second surface, an actuator (e.g., an integrated circuit piezoelectric actuator) having a support device and moveable extensions extending therefrom, which are coupled to the second surface, and electrodes coupled to corresponding ones of the extensions. Wavefront aberrations are detected and used to generate a control signal. The extensions are moved based on the control signal. The movement deforms the reflecting surface to correct the aberrations in the wavefront.
    Type: Grant
    Filed: October 6, 2005
    Date of Patent: May 13, 2008
    Assignee: ASML Holding N.V.
    Inventors: Pradeep K. Govil, Andrew Guzman