Abstract: The present invention provides systems and methods for improved lithographic printing with polarized light. In embodiments of the present invention, polarized light (radially or tangentially polarized) is used to illuminate a phase-shift mask (PSM) and produce an exposure beam. A negative photoresist layer is then exposed by light in the exposure beam. A chromeless PSM can be used. In further embodiments of the present invention, radially polarized light is used to illuminate a mask and produce an exposure beam. A positive photoresist layer is then exposed by light in the exposure beam. The mask can be an attenuating PSM or binary mask. A very high image quality is obtained even when printing contact holes at various pitches in low k applications.
Type:
Grant
Filed:
February 20, 2004
Date of Patent:
August 15, 2006
Assignee:
ASML Holding N.V.
Inventors:
Nabila Baba-Ali, Justin Kreuzer, Harry Sewell
Abstract: A light integrating column having an illumination column and windows that allow light to enter and exit the illumination column. The illumination column can be a solid rod or a hollow tube. In an embodiment, the windows are formed at an angle with respect to each other. Light from a light source enters through one of the windows. The light is internally reflected and diffused inside the illumination column. A diffused uniform light is transmitted out through another window. In an embodiment, a reflective coating is applied to a surface of the illumination column.
Abstract: ELL2 polypeptides and polynucleotides and methods for producing such polypeptides by recombinant techniques are disclosed. Also disclosed are methods for utilizing ELL2 polypeptides and polynucleotides in the design of protocols for the treatment of neoplastic disorders, among others and diagnostic assays for such conditions.
Type:
Grant
Filed:
February 19, 1998
Date of Patent:
December 28, 1999
Assignees:
Human Genome Sciences, Inc., Oklahoma Medical Research Foundation
Inventors:
D. Roxanne Duan, Ali Shilatifard, Joan W. Conaway, Ronald C. Conway
Abstract: Method for detecing Campylobacter by PCR detection of DNA sequence, highly conserved between species lari, coli, jejuni and upsaliensis. Speciation between these four is possible as the PCR product is differentially cleaved by restriction endonucleases.