Patents Represented by Attorney Sterne, Kressler, Goldstein & Fox, P.L.L.C.
  • Patent number: 7090964
    Abstract: The present invention provides systems and methods for improved lithographic printing with polarized light. In embodiments of the present invention, polarized light (radially or tangentially polarized) is used to illuminate a phase-shift mask (PSM) and produce an exposure beam. A negative photoresist layer is then exposed by light in the exposure beam. A chromeless PSM can be used. In further embodiments of the present invention, radially polarized light is used to illuminate a mask and produce an exposure beam. A positive photoresist layer is then exposed by light in the exposure beam. The mask can be an attenuating PSM or binary mask. A very high image quality is obtained even when printing contact holes at various pitches in low k applications.
    Type: Grant
    Filed: February 20, 2004
    Date of Patent: August 15, 2006
    Assignee: ASML Holding N.V.
    Inventors: Nabila Baba-Ali, Justin Kreuzer, Harry Sewell
  • Patent number: 7048424
    Abstract: A light integrating column having an illumination column and windows that allow light to enter and exit the illumination column. The illumination column can be a solid rod or a hollow tube. In an embodiment, the windows are formed at an angle with respect to each other. Light from a light source enters through one of the windows. The light is internally reflected and diffused inside the illumination column. A diffused uniform light is transmitted out through another window. In an embodiment, a reflective coating is applied to a surface of the illumination column.
    Type: Grant
    Filed: August 14, 2003
    Date of Patent: May 23, 2006
    Assignee: Cross Match Technologies, Inc.
    Inventors: George W McClurg, John F Carver
  • Patent number: 6008018
    Abstract: ELL2 polypeptides and polynucleotides and methods for producing such polypeptides by recombinant techniques are disclosed. Also disclosed are methods for utilizing ELL2 polypeptides and polynucleotides in the design of protocols for the treatment of neoplastic disorders, among others and diagnostic assays for such conditions.
    Type: Grant
    Filed: February 19, 1998
    Date of Patent: December 28, 1999
    Assignees: Human Genome Sciences, Inc., Oklahoma Medical Research Foundation
    Inventors: D. Roxanne Duan, Ali Shilatifard, Joan W. Conaway, Ronald C. Conway
  • Patent number: 6001565
    Abstract: Method for detecing Campylobacter by PCR detection of DNA sequence, highly conserved between species lari, coli, jejuni and upsaliensis. Speciation between these four is possible as the PCR product is differentially cleaved by restriction endonucleases.
    Type: Grant
    Filed: February 29, 1996
    Date of Patent: December 14, 1999
    Assignee: Public Health Laboratory Service Board
    Inventors: Andrew John Fox, Dennis Mackay Jones