Abstract: A final rinse/dry system for critical cleaning applications is provided having an ultrafiltration unit for providing an ultrapurified liquid to a holding chamber. A liquid conduit assembly connects the ultrafiltration unit to the holding chamber and controls the flow of the ultrapurified liquid therethrough. A liquid discharge assembly is connected to the liquid conduit assembly to selectively drain liquid from the holding chamber and the liquid conduit assembly. An inert gas conduit assembly provides the holding chamber with an inert atmosphere during drying, and a purge assembly is connected to the inert gas conduit assembly to bleed inert gas through the purge assembly to prevent contaminant build-up in the inert gas conduit assembly during the non-operating time thereof.