Abstract: A method for preforming electrochemical processes requiring the application of electricity on features of a substrate includes shorting out the features using a shorting layer across connectors to which the features a in electrical communication. Electricity is then applied and the process is performed.
Type:
Grant
Filed:
May 5, 1999
Date of Patent:
November 16, 1999
Assignee:
International Business Machines Corporation
Inventors:
Shaji Farooq, Suryanarayana Kaja, Hsichang Liu, Karen P. McLaughlin, Gregg B. Monjeau, Kim Hulett Ruffing