Patents Represented by Attorney, Agent or Law Firm Thomas G. Field, III
  • Method for treating semiconductor processing components and components formed thereby
    Patent number: 6825123
    Abstract: A method for treating a semiconductor processing component, including: exposing the component to a halogen gas at an elevated temperature, oxidizing the component to form an oxide layer, and removing the oxide layer.
    Type: Grant
    Filed: April 15, 2003
    Date of Patent: November 30, 2004
    Assignee: Saint-Goban Ceramics & Plastics, Inc.
    Inventors: Andrew G. Haerle, Richard F. Buckley, Richard R. Hengst
  • Ceramic media
    Patent number: 6703337
    Abstract: Ceramic media made using ceramic components comprising from 5 to 60% by weight of spodumene and 95 to 40 wt % of other ceramic-forming components comprising clay and feldspar have a reduced tendency to shrink upon firing to form the media and improved physical properties.
    Type: Grant
    Filed: May 15, 2002
    Date of Patent: March 9, 2004
    Assignee: Saint-Gobain Corporation
    Inventors: John S. Reid, Thomas Szymanski, Anne Hardy, James Salvatore, Michael J. Mangaudis
  • Ceramic packing element
    Patent number: 6699562
    Abstract: The invention provides an improved ceramic packing element having the basic shape of a cylinder with an aspect ratio, defined by the diameter to length dimensions that is from 2.7 to 4.5.
    Type: Grant
    Filed: February 28, 2002
    Date of Patent: March 2, 2004
    Assignee: Saint-Gobain Corporation
    Inventors: Hassan S. Niknafs, Robert L. Miller