Abstract: An ion source utilizing a cathode and anode for producing an electric arc therebetween. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma leaves the generation region and expands through another regon. The density profile of the plasma may be flattened using a magnetic field formed within a vacuum chamber. Ions are extracted from the plasma to produce a high current broad on beam.
Type:
Grant
Filed:
March 8, 1989
Date of Patent:
August 28, 1990
Inventors:
Ian G. Brown, Robert A. MacGill, James E. Galvin