Abstract: A chemical mechanical polishing composition, comprising, as initial components: water; 0.1 to 40 wt % abrasive having an average particle size of 5 to 150 nm; 0.001 to 1 wt % of an adamantyl substance according to formula (II); 0 to 1 wt % diquaternary substance according to formula (I); and, 0 to 1 wt % of a quaternary ammonium compound. Also, provided is a method for chemical mechanical polishing using the chemical mechanical polishing composition.
Type:
Grant
Filed:
June 15, 2010
Date of Patent:
July 31, 2012
Assignee:
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Inventors:
Yi Guo, Zhendong Liu, Kancharla-Arun Kumar Reddy, Guangyun Zhang
Abstract: Copolymers and terpolymers containing acyclic aliphatic olefin derived units and polar monomer derived units are disclosed. Also disclosed are methods of making such copolymers and terpolymers using late transition metal catalyst complexes.
Type:
Grant
Filed:
July 17, 2006
Date of Patent:
December 22, 2009
Assignee:
Rohm and Haas Company
Inventors:
Nathan Tait Allen, Brian Leslie Goodall, Lester Howard McIntosh, III
Abstract: The invention provides ftsY polypeptides and polynucleotides encoding ftsY polypeptides and methods for producing such polypeptides by recombinant techniques. Also provided are methods for utilizing ftsY polypeptides to screen for antibacterial compounds.
Type:
Grant
Filed:
May 11, 1999
Date of Patent:
April 10, 2001
Assignee:
SmithKline Beecham Corporation
Inventors:
Michael Terence Black, Deborah Dee Jaworski, Min Wang, Christopher Michael Traini, Anna Lisa Kosmatka, Richard Lloyd Warren, Jr.