Abstract: A method of preparing an ultra-pure metal amidinate compound comprising using a microchannel device for synthesis in reacting a metal halide solution with a lithium amidinate solution to produce an ultra-pure alkylmetal compound for processes such as chemical vapor deposition.
Type:
Grant
Filed:
February 5, 2010
Date of Patent:
April 5, 2011
Assignee:
Rohm and Haas Company
Inventors:
Francis Joseph Lipiecki, Stephen G. Maroldo, Deodatta Vinayak Shenai-Khatkhate, Robert A. Ware