Patents Represented by Attorney, Agent or Law Firm Timonthy M. Honeycutt
  • Electrochemically generated reactants for chemical mechanical planarization
    Patent number: 6689258
    Abstract: Various methods and apparatus for polishing semiconductor workpieces using electrochemically generated species are disclosed. In one aspect, a method of processing is provided that includes contacting a semiconductor workpiece to a solution, electrochemically generating a chemical species in the solution, and polishing the semiconductor workpiece with the aid of the solution.
    Type: Grant
    Filed: April 30, 2002
    Date of Patent: February 10, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Christopher H. Lansford, Jeremy S. Lansford