Patents Represented by Attorney, Agent or Law Firm Timothy J. King
  • Patent number: 8179929
    Abstract: A laser system for effective injection seeding is configured with a master oscillator lasing a narrowband seed radiation which is characterized by a single longitudinal master mode injected into a slave oscillator so that the latter generates a broadband slave radiation with a dominant slave mode and side slave modes. The slave radiation is coupled into an input of a SM fiber laser amplifier operative to output an amplified radiation with the spectra which is substantially as narrow as the spectra of the slave radiation.
    Type: Grant
    Filed: January 23, 2009
    Date of Patent: May 15, 2012
    Assignee: IPG Photonics Corporation
    Inventors: Valentin P. Gapontsev, Andrei Babushkin, Nicholai Platonov
  • Patent number: 7311808
    Abstract: A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.
    Type: Grant
    Filed: May 2, 2003
    Date of Patent: December 25, 2007
    Assignee: Entegris, Inc.
    Inventors: Qunwei Wu, Craig L. Brodeur, John E. Pillion, Jieh Hwa Shyu
  • Patent number: 7308932
    Abstract: An exchange apparatus comprised of hollow thermoplastic tubes infusion bonded into a thermoplastic material is disclosed. In a preferred embodiment the hollow tubes are shaped by plaiting the tubes into cords and then thermally annealing the cords to set the crests and bends of the plait. The cords provide improved flow distribution of fluid about the hollow tube tubes in the exchange apparatus. The exchange apparatus is chemically inert and is useful for cross flow filtration, as well as heat and mass transfer in harsh chemical environments.
    Type: Grant
    Filed: September 26, 2002
    Date of Patent: December 18, 2007
    Assignee: Entegris, Inc.
    Inventors: Cha P. Doh, Kwok-Shun Cheng, Alicia Briggs LaForge
  • Patent number: 7132048
    Abstract: The object is to provide a filter element extracting jig which facilitates the extracting operation of a filter element from a housing of a filter device and prevents its contamination. A filter element extracting jig is formed from an elastic plate and comprising a supporting portion, a spring portion extending at an acute angle with the supporting portion, a hook portion extending toward the supporting portion, and an operating portion extending from the hook portion at substantially right angles, which are constructed by bending at bent portions substantially parallel to each other in that order.
    Type: Grant
    Filed: April 27, 2004
    Date of Patent: November 7, 2006
    Assignee: Entegris, Inc.
    Inventor: Yukio Hagashihara
  • Patent number: 7112237
    Abstract: The present invention is directed to porous composite materials comprised of a porous base material and a powdered nanoparticle material. The porous base material has the powdered nanoparticle material penetrating a portion of the porous base material; the powdered nanoparticle material within the porous base material may be sintered or interbonded by interfusion to form a porous sintered nanoparticle material within the pores and or on the surfaces of the porous base material. Preferably this porous composite material comprises nanometer sized pores throughout the sintered nanoparticle material. The present invention is also directed to methods of making such composite materials and using them for high surface area catalysts, sensors, in packed bed contaminant removal devices, and as contamination removal membranes for fluids.
    Type: Grant
    Filed: December 11, 2003
    Date of Patent: September 26, 2006
    Assignee: Entegris, Inc.
    Inventors: Robert Zeller, Christopher Vroman
  • Patent number: 7112363
    Abstract: A crosslinked fluorocarbon such as perfluorocarbon, polymeric composition is provided having hydrophilic functional groups, which is crosslinked with fluorinated such as perfluorinated crosslinking groups. Also provided is a branched fluorocarbon such as perfluorocarbon, polymeric composition having hydrophilic functional groups.
    Type: Grant
    Filed: January 31, 2001
    Date of Patent: September 26, 2006
    Assignee: Entegris, Inc.
    Inventor: Wilson Moya
  • Patent number: 7101479
    Abstract: A filtration module (10) is provided which includes a manifold (12), a filter cartridge (16) and a bowl (14) which houses the filter cartridge (16). The filter cartridge (16) and bowl (14) are connected to each other by a key (30) which is secured to flat surfaces (38) on the cartridge (16) to form a unitary construction. The filter cartridge (16) and bowl (14) are in fluid communication with the manifold (12) in a manner which prevents mixing of a fluid feed to the module (10) and a permeate removed from the module (10).
    Type: Grant
    Filed: March 6, 2003
    Date of Patent: September 5, 2006
    Assignee: Entegris, Inc.
    Inventor: David Stockbower
  • Patent number: 7094469
    Abstract: A porous or non-porous polymeric substrate having its surface modified with an immobilized fluorocarbon such as perfluorocarbon, polymeric composition is provided. The immobilized fluorocarbon is formed from a monomer having formula: [T—SO2Y—SO2T?]?M+ in which —T and T? are identical or different and comprise an organic radical bearing at least one active polymerization function such as an unsaturation or a ring that can be opened; —M+ comprises an inorganic cation.
    Type: Grant
    Filed: August 28, 2001
    Date of Patent: August 22, 2006
    Assignee: Mykrolis Corporation
    Inventor: Wilson Moya
  • Patent number: 7087166
    Abstract: Providing a filter device with various functions, such as remarkable improvement of the throughput of the downstream filter, ion-removing property of the upstream filter. A filter element comprises an upstream filter and a downstream filter made of the same or different material and installed into one housing or container, wherein said downstream filter is fixed to said housing, said upstream filter is fixed to said downstream filter, both filters are concentrically arranged to each other, and when the downstream filter is not contaminated, only the upstream filter can be replaced with fresh one.
    Type: Grant
    Filed: October 1, 2001
    Date of Patent: August 8, 2006
    Assignee: Entegris, Inc.
    Inventors: Kazunori Sudo, Yoshiki Nomura
  • Patent number: 7052809
    Abstract: A gas porous media which comprises a material having a low coefficient of thermal expansion that is capable of retaining 99.99% or more of particles of a size of about 0.003 microns and larger at 0.2 slpm/cm2 while demonstrating a permeability of 3.5×10?12 m2 and a porosity of around 62% is disclosed. The porous media can be fabricated into a frame that is capable of retaining 99.9999999% of particles greater than 0.003 ?m in diameter at 8.3 sccm/cm2 with a permeability of 3.0×10?13 m2 and a porosity of around 53%. The porous medias can be tailored by changing the raw materials and process to yield media with a range of porosities and that exhibit permeability between 1.0E?13 and 1.0E?11 m2. The porous media are used in frames for supporting a pellicle and a reticle in a parallel relationship to each other. The frames may comprise porous media in its entirety or the porous media can be fabricated and sealed into a solid support frame.
    Type: Grant
    Filed: October 2, 2003
    Date of Patent: May 30, 2006
    Assignee: Mykrolis Corporation
    Inventors: Christopher J. Vroman, Nathan Abbott
  • Patent number: 7014679
    Abstract: A process for removing oxygen from a copper plating solution is provided. The solution is passed through a degasser comprising a shell and hollow hydrophobic fiber porous membranes wherein the shell while a vacuum is drawn on the surfaces of the fibers opposite the fiber surfaces contacted by the solution. Gas passed through the fiber walls while liquid is prevented from infiltrating the fiber pores. The composition of the solution is monitored so that the composition can be retained substantially constant by adding components of the solution as needed.
    Type: Grant
    Filed: January 31, 2002
    Date of Patent: March 21, 2006
    Assignee: Mykrolis Corporation
    Inventors: Bipin Parekh, Saksatha Ly, Qunwei Wu
  • Patent number: 6964187
    Abstract: An apparatus and method for measuring the vapor or gas content of a vacuum chamber (1) by a vapor sensor (21) located in the fore-line of a vacuum system is provide. The gas or vapor content is determined by first providing a zero condition for the sensor using the vacuum pump (25) and them referencing the sensor response to the chamber gas during the evacuation cycle.
    Type: Grant
    Filed: January 31, 2002
    Date of Patent: November 15, 2005
    Assignee: Mykrolis Corporation
    Inventor: John E. Pillion
  • Patent number: 6832626
    Abstract: A check valve construction is provided which includes a housing having a first flow path and a second flow path. Liquid flow is controlled within the first and second flow path by movable plungers (22, 24) having a sealing surface and a plurality of prongs that control the length of movement of the plunger within the housing. One of the plungers permits liquid flow while the other of the plungers prevents liquid flow in response to pressure change within the flow paths.
    Type: Grant
    Filed: February 5, 2003
    Date of Patent: December 21, 2004
    Assignee: Mykrolis Corporation
    Inventor: Iraj Gashgaee
  • Patent number: 6663745
    Abstract: A method for producing a filter element of a plurality of hollow fiber membranes made of perfluorinated thermoplastic polymer with a pot or seal made of perfluorinated thermoplastic polymer. A bundle of hollow fiber membranes is prepared with the fibers substantially aligned, with at least one end sealed. The sealed end is placed in a temporary recess made in a molten pool of perfluorinated thermoplastic potting material and held in the molten pool while potting material flows around and up the fibers to form a unified pot after cooling and solidification of the potting material.
    Type: Grant
    Filed: July 26, 2001
    Date of Patent: December 16, 2003
    Assignee: Mykrolis Corporation
    Inventors: Kwok-Shun Cheng, Cha P. Doh
  • Patent number: 6635175
    Abstract: A filter cartridge housing formed of a manifold and a bowl containing a filter cartridge is disclosed. The filtration cartridge and bowl are connected to each other to form a unitary construction. The filtration cartridge and bowl are in fluid communication with the manifold in a manner which prevents mixing of a fluid feed to the module and a permeate removed from the module. A threaded ring substantially fixed in a position relative to either the bowl or the manifold is used to positively drive the manifold and bowl together and apart as needed and to form a secure and liquid tight seal between the two components when they are together. The threaded ring is held by a key in the keyway on of the outer surface of the bowl or manifold. The threads of the ring mate with the threads on the manifold or bowl. As the ring is relatively fixed by the key/keyway to its position on the bowl or manifold, it moves the bowl relative to the manifold as the ring is rotated onto or off of the mating threads.
    Type: Grant
    Filed: June 28, 2001
    Date of Patent: October 21, 2003
    Assignee: Mykrolis Corporation
    Inventor: Ralph J. Stankowski
  • Patent number: 6617079
    Abstract: A process and system are provide for determining the acceptability of a fluid dispense such as a discrete volume of fluid used to coat a substrate. The fluid dispense is exposed to an energy source and the energy transmitted by the fluid dispense is detected to determine the shape of the fluid dispense. The fluid dispense shape and the timing of the beginning and end of the dispense are compared to previously generated standard dispense profiles and used to determine the acceptability of the shape and/or timing of the fluid dispense. The output from the sensor is used to control further processing of the substrate.
    Type: Grant
    Filed: June 19, 2000
    Date of Patent: September 9, 2003
    Assignee: Mykrolis Corporation
    Inventors: John E. Pillion, Robert McLoughlin, Jieh-Hwa Shyu
  • Patent number: 6596148
    Abstract: The present invention provides a system and method for selectively removing one or more organic and also preferably one or more inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize organic contaminants in the plating bath to a level such that the electroplating bath can be recovered and reused after appropriate chemical adjustment. The oxidative treatment method may be a continuous process or a batch process that is performed in a single pass and the endpoint of the oxidative process detected by a sensor. Residual organics, if desired, and chloride ions in the bath are removed from the solution by a chemisorption or physisorption treatment.
    Type: Grant
    Filed: August 30, 2000
    Date of Patent: July 22, 2003
    Assignee: Mykrolis Corporation
    Inventors: Brett Matthew Belongia, Zhen Wu Lin, John E. Pillion, Jieh-Hwa Shyu
  • Patent number: 6582496
    Abstract: A fully perfluorinated thermoplastic hollow fiber membrane fluid-fluid contactor and a process for manufacturing the contactor is described. The contactor has a unitary end structure produced by a single step potting and bonding process. The contactor can be operated with low surface tension liquids and in harsh chemical environments.
    Type: Grant
    Filed: July 24, 2001
    Date of Patent: June 24, 2003
    Assignee: Mykrolis Corporation
    Inventors: Kwok-Shun Cheng, Cha P. Doh
  • Patent number: 6524513
    Abstract: A filtration apparatus is provided which is formed from multilayer presealed elements and monolayer elements that are insert molded together. The device is provided with a feed port, a filtrate port and, optionally, a retentate port. The sealing configuration of the presealed elements and the seal provided by the insert molding step effect a seal configuration that causes a feed liquid to be filtered to form a filtrate such that the filtrate is not mixed with either the feed or a retentate.
    Type: Grant
    Filed: September 21, 1998
    Date of Patent: February 25, 2003
    Inventors: Steven R. Pearl, Wayne S. Merrill, Cristopher J. Petersen
  • Patent number: 6428852
    Abstract: A process for coating a solid surface (42) with a conditioned liquid composition of substantially uniform thickness is provided. A liquid composition is conditioned by a) degassing either via vacuum or by sparging with a high kinematic viscosity gas; and b) substantially maintaining the viscosity of the liquid composition. The conditioned liquid may then be dispensed onto a solid surface (42) positioned in a sub-atmospheric environment (37) or in a helium-rich environment (37). The solid surface (42) is rotated so that the liquid composition forms a uniformly thick coating free from bubbles on the solid surface (42) and thereby produces a thin film of uniform thickness.
    Type: Grant
    Filed: December 29, 2000
    Date of Patent: August 6, 2002
    Assignee: Mykrolis Corporation
    Inventors: John E. Pillion, Michael E. Clarke, Jill Boski