Patents Represented by Attorney Timothy M. Schaeberl

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  • Producing SOI structure using high-purity ion shower
    Patent number: 7608521
    Abstract: Disclosed are methods for making SOI and SOG structures using purified ion shower for implanting ions to the donor substrate. The purified ion shower provides expedient, efficient, low-cost and effective ion implantation while minimizing damage to the exfoliation film.
    Type: Grant
    Filed: May 31, 2006
    Date of Patent: October 27, 2009
    Assignee: Corning Incorporated
    Inventors: Jeffrey Scott Cites, Kishor Purushottam Gadkaree, Richard Orr Maschmeyer