Patents Represented by Attorney, Agent or Law Firm Tina Rose
  • Patent number: 6529260
    Abstract: A support assembly (12) for an exposure apparatus (10) includes a frame assembly (34), an elevator assembly (36) and a pivot assembly (38) for supporting at least one subassembly above an isolation base (32). The elevator assembly (36) selectively lifts the frame assembly (34) and the subassembly relative to the isolation base (32). Further, the pivot assembly (38) allows a portion of the frame assembly (34) and the subassembly to be rotated relative to the isolation base (32). As a result of this design, the subassemblies of the exposure apparatus (10) can be removed relatively easily for service and adjustment.
    Type: Grant
    Filed: May 3, 2001
    Date of Patent: March 4, 2003
    Assignee: Nikon Corporation
    Inventor: Michael R. Sogard