Patents Represented by Attorney, Agent or Law Firm Todd C. Li
  • Flash memory structure using sidewall floating gate
    Patent number: 6809372
    Abstract: A flash memory and a method of forming a flash memory, includes forming a polysilicon wordline on a substrate, the wordline having first and second sidewalls, the first sidewall being tapered, with respect to a surface of the substrate, to have a slope angle and the second sidewall having a slope angle greater than the slope angle of the first sidewall. Thereafter, a polysilicon spacer is formed on the second sidewall while simultaneously removing the polysilicon on the first sidewall. The polysilicon spacer forms a floating gate which is surrounded on a plurality of sides by the second sidewall.
    Type: Grant
    Filed: January 9, 2001
    Date of Patent: October 26, 2004
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey P. Gambino, Louis L. Hsu, Jack A. Mandelman, Donald C. Wheeler
  • Flash memory structure using sidewall floating gate and method for forming the same
    Patent number: 6252271
    Abstract: A flash memory and a method of forming a flash memory, includes forming a polysilicon wordline on a substrate, the wordline having first and second sidewalls, the first sidewall being tapered, with respect to a surface of the substrate, to have a slope angle and the second sidewall having a slope angle greater than the slope angle of the first sidewall. Thereafter, a polysilicon spacer is formed on the second sidewall while simultaneously removing the polysilicon on the first sidewall. The polysilicon spacer forms a floating gate which is surrounded on a plurality of sides by the second sidewall.
    Type: Grant
    Filed: June 15, 1998
    Date of Patent: June 26, 2001
    Assignee: International Business Machines Corporation
    Inventors: Jeffrey P. Gambino, Louis L. Hsu, Jack A. Mandelman, Donald C. Wheeler