Patents Represented by Attorney Tung & Asscociates
  • Patent number: 7368775
    Abstract: A single transistor planar DRAM memory cell with improved charge retention and reduced current leakage and a method for forming the same, the method including providing a semiconductor substrate; forming a gate dielectric on the semiconductor substrate; forming a pass transistor structure adjacent a storage capacitor structure on the gate dielectric; forming sidewall spacer dielectric portions adjacent either side of the pass transistor to include covering a space between the pass transistor and the storage capacitor; forming a photoresist mask portion covering the pass transistor and exposing the storage capacitor; and, carrying out a P type ion implantation and drive in process to form a P doped channel region in the semiconductor substrate underlying the storage capacitor.
    Type: Grant
    Filed: July 31, 2004
    Date of Patent: May 6, 2008
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chih-Mu Huang, Mingchu King, Yun Chang