Patents Represented by Attorney Turie A. Schwartz

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  • Process for carbon dioxide recovery from a process tool
    Patent number: 7018444
    Abstract: A system for removing and purifying a carbon dioxide-containing stream from a batch process tool is provided. A multi-phase contaminated stream containing at least carbon dioxide and one or more co-solvent is removed from a process tool and conveyed to at least one intermediate pressure separator. The contaminant-containing stream is separated into an intermediate pressure carbon dioxide-enriched vapor stream and an intermediate pressure solvent and contaminant-enriched stream in the intermediate pressure separator.
    Type: Grant
    Filed: May 7, 2003
    Date of Patent: March 28, 2006
    Assignee: Praxair Technology, Inc.
    Inventors: John Frederic Billingham, Thomas John Bergman, Jr., Richard Martin Kelly, Kenneth Leroy Burgers, William Thoru Kobayashi
  • Apparatus and method for making metal oxide sputtering targets
    Patent number: 6582641
    Abstract: An apparatus and process for making metal oxide sputtering targets from volatile and thermally unstable metal oxide powder by hot-pressing the metal oxide powder in a graphite die assembly having a ceramic barrier sleeve disposed therein to isolate the metal oxide powder from the graphite die assembly components.
    Type: Grant
    Filed: August 25, 1994
    Date of Patent: June 24, 2003
    Assignee: Praxair S.T. Technology, Inc.
    Inventors: Chi-Fung Lo, John Turn