Patents Represented by Attorney, Agent or Law Firm U. P. Peter Eng
  • Patent number: 6616394
    Abstract: Systems and methods are described for wafer processing. A wafer processing apparatus includes: a first wafer transporter; a process station coupled to the first wafer transporter, the process station including: a first plurality of wafer processing stacks, each of the plurality of wafer processing stacks including a plurality of wafer processing modules, and a second wafer transporter coupled to the plurality of wafer processing modules, each of the plurality of wafer processing modules adjacent, and accessible by, the second wafer transporter; and a third wafer transporter coupled to the process station, wherein any of the plurality of wafer processing modules in any of the plurality of wafer processing stacks can be accessed by at least two adjacent wafer transporters from among the first, second and third wafer transporter.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: September 9, 2003
    Assignee: Silicon Valley Group
    Inventor: Jae Heon Park
  • Patent number: 6577793
    Abstract: An optical switch includes a plurality of transmitting devices with a plurality of optical fibers that each have a distal end. A plurality of focusing devices are included. Each distal end of a fiber is coupled to at least one focusing device. A plurality of receiving devices are provided. At least a portion of the distal ends of the optical fibers move in three orthogonal and at least two angular dimensions to direct output beams from the plurality of transmitting devices to the plurality of receiving devices.
    Type: Grant
    Filed: June 27, 2001
    Date of Patent: June 10, 2003
    Assignee: MegaSense, Inc.
    Inventor: Vladimir I. Vaganov
  • Patent number: 6533531
    Abstract: A wafer handling device includes a platform having a plurality of movable grippers. A driver is mounted on the platform and selectively couples to at least one of the plurality of grippers to selectively move at least one of the plurality of grippers with regard to the platform. The driver may be magnetically coupled to at least one gripper to move it between a first proximal position and a first distal position. The driver may be mounted on the platform with a track assembly that effectuates a linear magnetic propulsion field to move the driver between the first axial position and the second axial position.
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: March 18, 2003
    Assignee: ASML US, Inc.
    Inventors: Binh Quoc Nguyen, Alton Phillips
  • Patent number: 6534080
    Abstract: A method for administering a camptothecin to a patient comprising: injecting into a patient a pharmaceutical composition comprising an aqueous suspension of solid particles suitable for intravenous delivery, the solid particles comprising a camptothecin, and a 0.3 nm to 3.0 &mgr;m thick layer of a membrane-forming amphipathic lipid wherein the solid particles have mean diameters between about 0.05 &mgr;m and 10 &mgr;m. The method is particularly well suited for delivering camptothecins, particularly 9-nitro-camptothecin intravenously.
    Type: Grant
    Filed: February 12, 2001
    Date of Patent: March 18, 2003
    Assignees: Super Gen, Inc., RTP Pharma Inc.
    Inventors: Howard Sands, Awadhesh Mishra
  • Patent number: 6509027
    Abstract: A pharmaceutical composition is provided which comprises an aqueous suspension of solid particles, the solid particles comprising a camptothecin, the solid particles having mean diameters between about 0.05 um and 10 um, the particles coated with a 0.3 nm to 3.0 um thick layer of a membrane-forming amphipathic lipid. The pharmaceutical composition is particularly well suited for delivering camptothecins, particularly 9-nitro-camptothecin intravenously.
    Type: Grant
    Filed: February 12, 2001
    Date of Patent: January 21, 2003
    Assignees: SuperGen, Inc., RTP Pharma Inc.
    Inventors: Howard Sands, Awadhesh Mishra
  • Patent number: 6497896
    Abstract: A method for administering a camptothecin to a patient comprising: injecting into a patient a pharmaceutical composition comprising an aqueous suspension of microdroplets suitable for intravenous delivery, the microdroplets having a mean diameter between 200 Angstroms and one micron, the microdroplets comprising a substantially water-insoluble, pharmacologically acceptable liquid, a camptothecin dissolved in the water-insoluble, pharmacologically acceptable liquid, and an outer layer comprising a phospholipid. The pharmaceutical composition is particularly well suited for delivering camptothecins, particularly 9-nitro-camptothecin intravenously.
    Type: Grant
    Filed: February 12, 2001
    Date of Patent: December 24, 2002
    Assignees: SuperGen, Inc., R T P Pharma Inc.
    Inventors: Howard Sands, Awadhesh Mishra
  • Patent number: 6492654
    Abstract: A system is provided for scanning an object, the system comprising: a drive shaft having a proximal portion and a longitudinal axis; a motor including a motor shaft having a rotational axis, the motor serving to rotate the motor shaft about the rotational axis; a flexible joint coupling the drive shaft to the motor shaft by the proximal portion of the drive shaft, the flexible joint having a range of motion which allows the longitudinal axis of the drive shaft to move relative to the rotational axis of the motor shaft; and an object attached to the drive shaft which is movable along the longitudinal axis of the drive shaft in response to the drive shaft being rotated by the motor. This system may be used in a drum scanner system and may be used to read storage layer radiation screens.
    Type: Grant
    Filed: February 13, 2001
    Date of Patent: December 10, 2002
    Assignee: Alara, Inc.
    Inventors: Edward P. Donlon, Joseph R. Rimsa, Louis Hlousek
  • Patent number: 6472643
    Abstract: This invention is a substrate thermal management system for efficient, rapid, controllable and uniform thermal management over a wide temperature range. The thermal management system integrates a thermal source, thermal sink and a thermal diffuser. According to the invention, a thermal diffuser is positioned stationary relative to the wafer surface and coupled to a thermal source and a thermal sink, which are also stationary relative to the wafer surface. The thermal source includes a plurality of zones adapted to provide differing amounts of heat and a controllable temperature field over a surface proximal to the thermal diffuser. The thermal sink comprises a heat-carrying media with a controllable temperature.
    Type: Grant
    Filed: March 7, 2000
    Date of Patent: October 29, 2002
    Assignee: Silicon Valley Group, Inc.
    Inventor: Dikran S. Babikian
  • Patent number: 6453306
    Abstract: A system that permits commercial transactions over a network of computers is described. In one example, the network of computers supports communications between business relation data structures. The business relation data structures reflect credit relationships between two or more businesses. To perform a commercial transaction, a consumer accesses a vendor's Web site. The consumer selects an item to purchase from that Web site. The vendor computer then generates a proposal. The proposal includes an item identifier and a price. That proposal is then propagated to all of the business relation data structures with which the vendor's business relation data structure can communicate. At each one of the recipient business relation data structures, the proposal is modified and forwarded on to other business relation data structures. The modifications are based upon the credit relations between businesses.
    Type: Grant
    Filed: December 1, 1998
    Date of Patent: September 17, 2002
    Assignee: ICT Software S.A.
    Inventor: Jacques Quelene
  • Patent number: 6438241
    Abstract: A rotary control for control surface on a processor, like on a large scale audio mixer or other system, includes an illuminated display for angular position, such as lights arranged in an arcuate pattern indicating the value of a parameter by an angular position, on the top of the knob. By placing the display directly on the top of the knob, a crisp illumination is provided allowing an operator to obtain rapid visual feedback concerning the parameters under control. Furthermore, the display allows a variety of display modes, which are suited to the particular parameter under control. The rotary control comprises a stator mounted on the control surface which has a proximal end adjacent to control surface and a distal end. An array of lights is mounted on the distal end of the stator and arranged in an arcuate pattern. A rotor is mounted on the stator, and operable by an operator. The rotor has a shape near the distal end so that the array of lights is visible to the operator.
    Type: Grant
    Filed: February 23, 1998
    Date of Patent: August 20, 2002
    Assignee: Euphonix, Inc.
    Inventors: Scott W. Silfvast, Kent A. Suzuki, Arthur H. Zarnowitz