Abstract: A layered test pattern for measuring registration and critical dimension (CD) for multi-layer semiconductor integrated circuits is disclosed. A first layer includes a first pattern having vertical and horizontal portions. A second layer is formed over the first layer and includes a second pattern having vertical and horizontal portions having nominal vertical and horizontal phase shifts with respect to the vertical and horizontal portions, respectively, of the first pattern. The vertical and horizontal portions include periodically repeating vertical lines and horizontal lines, respectively. The nominal phase shifts may be half of the period of the vertical and horizontal lines. A scatterometry tool measures the width of the lines and the phase shift of the first pattern relative to the second pattern. The width of the lines corresponds to CD, whereas the difference between the measured phase shift and the nominal phase shift indicates variation in registration.

Abstract: A system and method are disclosed for environmental stabilization of a body of water. A body of water is stabilized by extracting water from a higher elevation body of water at a downhill flow rate, receiving the water at lower elevation body of water, and extracting water from the lower elevation body of water to a higher elevation body of water or the like at an uphill flow rate. In certain embodiments, the invention may also include extracting energy from the downhill flow rate and using at least a portion of the energy to generate an uphill flow rate. The system and method may also include temporarily adjusting the downhill and uphill flow rates in preparation for a high demand interval.