Abstract: A method for making multilayer resist structures for microlithographic processing using a thermosetting anti-reflective coating is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
Type:
Grant
Filed:
August 6, 1996
Date of Patent:
July 6, 1999
Assignee:
Brewer Science, Inc.
Inventors:
Tony D. Flaim, Jim D. Meador, Xie Shao, Terry Lowell Brewer
Abstract: High strength fiber reinforced ceramic composites having low dielectric constants stable against high temperatures are made possible by post oxidation of 35-60 volume percent ceramic matrix enveloping 20-60 volume percent ceramic fiber.
Abstract: A dispensable-head toothbrush and dispenser combination comprising (1) a handle, squeezable along its longitudinal axis, having a large end opposite of a narrow tongue-like member, which are both dimensionally reduced when squeezing said handle at its large end; and (2) a plurality of hollow dispensable toothbrush heads, each having an opening for receiving and releasably engaging said tongue means of the handle; and (3) a toothbrush head dispenser having individual compartments in which each one of the plurality of heads rest so as to expose the opening in said heads to having the tongue means of the handle inserted there into.
Abstract: A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wavelengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 3.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast crosslinking agent, all present in a low-to-medium alcohol-containing solvent.
Type:
Grant
Filed:
August 21, 1995
Date of Patent:
December 2, 1997
Assignee:
Brewer Science, Inc.
Inventors:
Tony D. Flaim, Jim D. Meador, Xie Shao, Terry Lowell Brewer
Abstract: Mid-UV dyes enabling ultra thin antireflection coatings for multi-layer i-line photoetching are produced from bichalcones; bis-a-cyanoacrylates/bis-cyanoacrylamides; and 1.4 divinylbenzenes. The dyes are nonsubliminal and differentially insoluble in standard photoresist solvents.
Type:
Grant
Filed:
November 9, 1994
Date of Patent:
November 18, 1997
Assignee:
Brewer Science, Inc.
Inventors:
Jim D. Meador, Xie Shao, Vandana Krishnamurthy, Earnest C. Murphy, Tony D. Flaim, Terry Lowell Brewer
Abstract: An improved protective coating system for metal substrates is described. Nickel-aluminide duplex coatings are improved by adding an effective amount of boron in the nickel coating step and by retaining the boron during the aluminization step. An unexpected result of the retained boron is its non-deleterious effect on oxidation protection. During aluminization, the boron surprisingly migrates to the coating/substrate interface, forming a diffusion barrier in situ. The barrier inhibits both inward diffusion of the nickel-aluminide coating and outward diffusion of substrate impurities. The process enables thinner, less expensive coatings.
Type:
Grant
Filed:
April 24, 1995
Date of Patent:
August 26, 1997
Inventors:
Douglas J. Peterman, Joan E. Deffeyes, James E. O'Neal