Patents Represented by Attorney W. J. Karambelas A. W. Bethurum
  • Patent number: 4388560
    Abstract: Thermionic cathode 12 for a plasma ion source 10 has tungsten wire 64 advanced by wheels 56 from supply 50 to take-up spool 58. In chamber 48, the active cathode region 64 acts with anode 16 to supply electrons for ionizing a fuel gas so the ions are discharged from slit 18 for acceleration, separation and implantation.
    Type: Grant
    Filed: May 26, 1981
    Date of Patent: June 14, 1983
    Assignee: Hughes Aircraft Company
    Inventors: William P. Robinson, Hugh McNulty, Jr., Robert L. Seliger, Weldon S. Williamson