Abstract: Thermionic cathode 12 for a plasma ion source 10 has tungsten wire 64 advanced by wheels 56 from supply 50 to take-up spool 58. In chamber 48, the active cathode region 64 acts with anode 16 to supply electrons for ionizing a fuel gas so the ions are discharged from slit 18 for acceleration, separation and implantation.
Type:
Grant
Filed:
May 26, 1981
Date of Patent:
June 14, 1983
Assignee:
Hughes Aircraft Company
Inventors:
William P. Robinson, Hugh McNulty, Jr., Robert L. Seliger, Weldon S. Williamson