Abstract: A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.
Type:
Grant
Filed:
August 31, 1982
Date of Patent:
June 12, 1984
Assignee:
The United States of America as represented by the United States Department of Energy
Inventors:
Thomas R. Werner, Charles M. Falco, Ivan K. Schuller