Abstract: In a monitoring method of an exposure apparatus, a top critical dimension (TCD) and a bottom critical dimension (BCD) of the test pattern formed on a photo-sensitive material layer are measured. A dose deviation (?E) and a focus deviation (?F) are calculated by following equations: TCD+BCD=??E+(TCD0+BCD0) TCD?BCD=?1?F+?2?F3 Here, ?, ?1 and ?2 are constants, ?E=E?E0, ?F=F?F0, E represents a real exposure dose, F represents a real exposure focus, E0 represents a dose defined when a middle critical dimension of the test pattern is equal to a predetermined value, F0 represents a focus defined when TCD of the test pattern is equal to BCD thereof, and TCD0 and BCD0 are theoretical values in case of E0 and F0.

Abstract: A sealing material for solid oxide fuel cells is provided, which is composed of around 60% to 80% by weight of glass, around 20% to 30% by weight of alcohol, around 0.5% to 3% by weight of ethyl celluloid as a binder, and around 0.01% to 0.1% by weight of polyethylene glycol as a plasticizer.