Abstract: A process for reducing roughness from a surface of a patterned photoresist. The process includes exposing a substrate having the patterned photoresist thereon to a vapor, wherein the vapor penetrates into and/or reacts with the surface of the photoresist. The substrate having the patterned photoresist thereon is then heated to a temperature and for a time sufficient to cause the surface of the photoresist to flow and/or react with the vapor wherein the surface roughness decreases. Optionally, the substrate is exposed to radiation during the process to increase the etch resistance of the photoresist and/or facilitate the reaction of the vapor with the surface of the photoresist.

Abstract: A water spreader arrangement for use in an evaporative air cooler in which the spreader includes an inlet (28) leading to generally vertical projections (38) disposed over several levels. The projections (34, 37, 38) are adapted to divide a single steam of water entering the inlet (28) into many outlet streams, all of which have a predetermined ratio of flow rates. The outlet streams can be fed to an evaporative pad of an evaporative cooler. In a preferred form, the outlet streams have substantially the same flow rate. Preferably, a cooler incorporating this water spreader arrangement would include several spreaders around the upper periphery of tho evaporative pads.

Abstract: A detection method of coating film thickness and an ion implantation equipment using the detection method. The detection method comprises providing on a surface of materials, such as disk (11) of a wafer support on which a coating film comprising a low conductive material, an electrical measurement sensor (18) having a coating film comprising the same material, and detecting thickness change of the coating film on the surface of the materials by irradiation with particle beams in the form of a signal from the sensor (18). The ion implantation equipment comprises an electrical measurement sensor provided on a disk and having a sample piece that forms a coating film of the same material as that of a surface coating of the disk, and means to monitor thickness change of the coating film by sensor signal from the measurement sensor.

Abstract: A mechanism is disclosed for the activation of a system which will deliver material such as a fire extinguishant in response to an electrical signal from a fire detector. The mechanism is actuated by a small electrical storage device which operates the system even after a fire or other event has occurred and the normal electrical supply is lost. Upon actuation, a container of pressurized carbon dioxide gas is used to pressurize a container of fire extinguishing fluid, which is then delivered by a spray mechanism to the source of the fire. A feature of the mechanism is that energy levels for initiation are very low, and all other sources of energy are self contained within the mechanism.