Patents Represented by Attorney Werner H. Stemere

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  • Method for producing a microelectronic sensor
    Patent number: 6156586
    Abstract: The invention relates to a microelectronic integrated sensor, in which a cantilever is formed. To avoid mechanical stress during the production process, the cantilever is disposed freely movably in the sensor. To that end, a support for retaining the cantilever and lateral and upper motion limiters are provided, which prevent the cantilever from slipping off the support. The invention also relates to a method for producing such a sensor.
    Type: Grant
    Filed: September 30, 1996
    Date of Patent: December 5, 2000
    Assignee: Infineon Technologies AG
    Inventor: Stefan Kolb