Patents Represented by Attorney, Agent or Law Firm William D. Sabb, Esq.
  • Self-aligned contact areas for sidewall image transfer formed conductors
    Patent number: 6566759
    Abstract: A structure for forming a sidewall image transfer conductor having a contact pad includes forming an insulator to include a recess, depositing a conductor around the insulator, and etching the conductor to form the sidewall image transfer conductor, wherein the conductor remains in the recess and forms the contact pad and the recess is perpendicular to the sidewall image transfer conductor.
    Type: Grant
    Filed: August 23, 1999
    Date of Patent: May 20, 2003
    Assignee: International Business Machines Corporation
    Inventors: Edward W. Conrad, Chung H. Lam, Dale W. Martin, Edmund Sprogis