Abstract: A dynamic random access memory device formed in a substrate having a trench. The trench has a side wall, a top, a lower portion, and a circumference. The device includes a signal storage node including a storage node conductor formed in the lower portion of the trench and isolated from the side wall by a node dielectric and a collar oxide above the node dielectric. A buried strap is coupled to the storage node conductor and contacts a portion of the side wall of the trench above the collar oxide. A trench-top dielectric which is formed upon the buried strap has a trench-top dielectric thickness.
Type:
Grant
Filed:
April 7, 1999
Date of Patent:
April 23, 2002
Assignee:
International Business Machines Corporation
Inventors:
Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, Thomas S. Kanarsky, Jeffrey J. Welser