Abstract: A spin coating apparatus and method of manufacturing incorporating a perforated sheet located above the substrate in a manner to control solvent evaporation that tends to occur in the coating vessel when the chuck is rotated without introducing additional airflow complications. The distance between the substrate surface and the perforated sheet, and the number, distribution, and size of the perforations in the perforated sheet can be adjusted to optimize the uniformity of film thickness coating the substrate. The result is reduced substrate and room contamination and enhanced coating uniformity.
Type:
Grant
Filed:
October 23, 2002
Date of Patent:
April 6, 2004
Assignee:
The United States of America as represented by the Secretary
of the Air Force
Inventors:
David William Weyburne, Qing Sun-Paduano