Abstract: Apparatus for monitoring the product temperature in an open ended furnace of the secondary emission type, the furnace having a plurality of serially arranged heating zones therein and including a conveyor which passes through the muffle of the furnace for carrying product thereon through the furnace. The furnace includes apparatus for adjusting the temperature in each of the zones. At least one cable passes through the furnace superimposed of the conveyor and carries thereon a plurality of temperature sensors which are serially arranged along the cable. The sensors are connected externally of the furnace to provide external monitoring of the temperatures in at least preselected zones (critical zones) of the furnace while the cable is provided with sag inhibiting apparatus to keep tension on the cable when the furnace is in operation.

Abstract: Apparatus for monitoring product temperature in a furnace, the furnace being of the open ended and secondary emission type, and having a plurality of serially arranged heating zones therein, each of the zones being adjustably heated. The furnace includes a conveyor which passes therethrough for carrying product thereon through the furnace. As is conventional, the furnace includes an outer casing or wall and an inner muffle with a cavity therebetween. Heaters are provided for applying heat to the cavity to heat the wall of the muffle. Tubes are provided for passing through the casing and into the muffle so that temperature sensing means may pass through the tubes into the muffle superimposed of the conveyor. The temperature sensors are connected to a monitoring system for amplification and for monitoring the temperatures directly of at least the critical zones of the furnace so that adjustment of the temperature may be made within preselected zones without causing loss of product.

Abstract: Disclosed is a selection apparatus for a printer of the single element type wherein the single print element is carried by a print carrier. The carrier includes at least one cylinder having a plurality of axially spaced apart camming surfaces thereon, the cylinder mounted for both axial and rotational movement. Each of a plurality of selection pins is engageable with one of the camming surfaces to impart a predetermined but differing axial motion of the cylinder upon engagement of one of the pins with its associated camming surfaces and rotation of the cylinder. Pin selection apparatus permits engagement of selected ones of the pins with an associated camming surface, the pin selection apparatus including pin motion inhibiting apparatus associated therewith so as to inhibit multiple pin selection with associated camming surfaces to thereby prevent any attempt at differential camming of the cylinder along its axis by more than one pin engaging more than one camming surface.

Abstract: Disclosed is a method of aligning a plurality of probes to a plurality of contacts, the contacts being arragned in a pattern on a substrate. The method includes the steps of powering one of a selected pattern of probes or a like pattern of selected contacts such that upon the selected patterns being in coincidence, the plurality of probes will be in contact with predetermined contacts on the substrate. This is accomplished by providing a circuit path through all of the other probes or contacts which are not powered and then bringing the plurality of probes into contact at random with the contacts of the substrate and then moving one of the substrate and probes until the selected patterns coincide as by indication of a completed circuit path between selected patterns.

Abstract: Printing apparatus has an ink jet printhead mounted on a carrier for movement during printing of characters between left and right margin locations relative to a document. A directionally oriented grating and associated circuitry is provided to maintain a record of character and ink drop printing locations. The printhead begins its movement prior to the left margin location and sweeps toward the right margin for printing of an entire line of characters. Thereafter, the printhead is returned to the aforesaid position prior to the left margin in readiness for another line sweeping action. Provision is made for testing carrier velocities encountered in movement to the right during printing as well as to the left during carrier return and for determining optimum times of operation of the carrier return magnet and its release in order to reduce time required for carrier turnaround.

Abstract: Apparatus for positioning a workpiece and tool in a precise location relative to each other by positioning in a predetermined site the workpiece, and then positioning the tool in a precise predetermined position relative to the site in minimum total time. The apparatus comprises a closed loop position and velocity sensitive servo system connected to the workpiece, the servo system including positioning apparatus for positioning the workpiece in a predetermined site. A position indicator determines the actual position to the workpiece relative to a fixed reference and emits a signal output which is compared, in an error generator, with the desired position of the workpiece relative to the reference. The difference signal, from the error generator, is applied to the positioner and is used to bring the workpiece into the site. The positioner is provided with velocity feedback which cooperates with the positioning signal from the error generator to drive the workpiece into the predetermined site.

Abstract: Apparatus for positioning a workpiece and tool in a precise location relative to each other by positioning in a predetermined site the workpiece, and then positioning the tool in a precise predetermined positon relative to the site in minimum total time. The apparatus comprises a closed loop position and velocity sensitive servo system connected to the workpiece, the servo system including positioning apparatus for positioning the workpiece in a predetermined site. A position indicator determines the actual position of the workpiece relative to a fixed reference and emits a signal output which is compared, in an error generator, with the desired position of the workpiece relative to the reference. The difference signal, from the error generator, is applied to the positioner and is used to bring the workpiece into the site. The positioner is provided with velocity feedback which cooperates with the positioning signal from the error generator to drive the workpiece into the predetermined site.

Abstract: Disclosed is a wet processing station in which control of the PH of the processor liquid is mandatory within predetermined limits, the processor including a tank having means to subject product to a bath of processing liquid. A PH monitoring probe is positioned in the tank with a pump in the tank for mixing processing liquid therein. The pump has a liquid intake and a discharge, the intake being positioned closely adjacent to the probe so that liquid being mixed in the tank will flow across the probe into the intake of the pump. A processing liquid concentrate holder is coupled to liquid concentrate carrying means which connect the holder to the probe, the liquid carrying means having an outlet which is positioned to discharge concentrated processing liquid directly onto the probe. Probe monitoring means which is responsive to the output of the PH monitoring probe provides a signal output when the PH of the processing liquid reaches at least a predetermined lower limit.

Abstract: A planetary evaporator having at least one source of material for coating, by evaporation, workpieces such as semiconductor wafers. The apparatus includes a pallet mounted for rotation about its own axis, and substrate or workpiece holders mounted on the pallet which orbit said axis. Guides support the pallets and a cam follower on the pallet follows a cam to effect reciprocation of the pallet as it rotates, the guides being adapted for rotation about another axis which is substantially perpendicular to the axis of rotation of the pallet. In another embodiment the substrate holders are also rotated so as to give four degrees of freedom of the workpiece or substrate relative to the material source.

Abstract: Disclosed is ion implantation apparatus in which an ion source is coupled to a semiconductor or workpiece holder which is mounted for rotation and reciprocation in a first chamber in the path of the ion beam. A second chamber is releasably coupled to the first chamber with means connected to the second chamber in such a manner as to enable displacement between the first and second chamber, the chambers being in fluid communication with one another when the apparatus is in operation. Vacuum drawing means are provided to effect a vacuum in both the first and second chamber when the apparatus is in operation, and when it is desired to withdraw the holder from the apparatus by disconnecting the second chamber from the first chamber, venting the first chamber automatically actuates a check valve which seals the second chamber permitting the retention of a vacuum in the second chamber while allowing the first chamber to be exposed to atmospheric pressure.

Abstract: This patent discloses apparatus for retaining a semiconductor wafer in a predetermined position or orientation to permit dicing of the wafer into discrete semiconductor chips of a predetermined size without dislocation of the chips during the dicing operation, the chips being arranged in columns and rows with a kerf area intermediate adjacent chips. The apparatus comprises a base member having a semicondcutor wafer positioning area with a connection to the base member for applying the vacuum to a plurality of spaced apart apertures in the wafer receiving area, the apertures corresponding to the location of the chips.

Abstract: This patent discloses an improved gas discharge display panel typically of the type used for luminous displays showing lines of electrically changeable alpha-numeric characters, figures and the like. The gas discharge display panel comprises a transparent front cover plate, a rear cover plate, and marginal sealing areas extending adjacent to and about the periphery of each of the plates.The rear plate includes a plurality of contiguous layers of gas impervious material and electrical wiring intermediate the layers. Intermediate the plates is a thin flat chamber containing ionozable gas. Facing each other are a plurality of dielectrically coated electrodes mounted in the chamber, the electrodes of one group being mounted on the front plate at substantially right angles to but not contacting the electrodes of the second group mounted on the rear plate. To effect a localized ionization discharge of the gas, voltages are applied to electrically selected facing electrodes.

Abstract: A monocrystalline silicon ingot is grown from molten silicon by progressively lifting a monocrystalline seed from the molten silicon, which is disposed within a crucible in a furnace, through mounting the seed on a graphite pull shaft. The pull shaft is surrounded by a bellows, which is connected to a carriage to which the pull shaft also is connected. A seal, which is carried by the bellows structure, seals the pull shaft in its rotary motion. Because the bellows structure and the pull shaft are both connected to the carriage, there is no relative linear motion therebetween so that there is no necessity to seal for linear motion of the pull shaft. A pair of lifting mechanisms is connected to diametrically opposite sides of the carriage to support the carriage and to exert a lifting force on the pull shaft along its longitudinal axis. The crucible also must be raised as the level of the molten silicon is depleted due to the formation of the ingot on the seed at the end of the pull shaft.

Abstract: A wheel stand for supporting a wheel rim, the stand comprising a base having a hub connected thereto and spaced inwardly and axially from the plane of the base. A plurality of pivots are connected to and spaced about the base and a shaft is mounted in the hub for rotation therein, the shaft including a projecting threaded portion with an actuator nut mounted on the projecting threaded portion for axial reciprocation along the shaft upon rotation thereof. A plurality of rim supports are each connected to a pivot for rotation in a plane perpendicular to the plane of the base, the hub including a plurality of radially projecting arms which are rigidly connected to the nut. A cam is mounted on each of the arms associated with the nut and a cam follower means is mounted on each of the rim support means, each cam and cam follower being coupled in cooperative relationship whereby axial reciprocation of the nut effects rotation of the rim supports about the pivots.

Abstract: A tool for removing a tire from an annular rim, the rim having an upstanding circumferentially extending flange and having a substantially closed web with a central aperture therein, the tool comprising a barrel having a radially extending bracket thereon. A rod having a first portion which extends through the barrel is adjustable axially of the barrel, the rod including a second portion which extends substantially perpendicular to the first portion. The second portion of the rod has a length sufficient to overlie the central aperture of the web of the rim. A shoe member is slidably disposed on the second portion of the rod and adapted to embrace the web of the rim on one side thereof with the second portion of the rod on the opposite side thereof adjacent the periphery of the aperture. Locking means are disposed for clamping the first portion of the rod in a predetermined axial position in the barrel.

Abstract: A fluid pressure amplifier for intensifying fluid pressure, the amplifier comprising a housing including a gas-hydraulic interface piston; a first chamber includes a slave piston mounted for reciprocation therein and for abutting engagement with a work piece. A hydraulic fluid path extends intermediate the interface piston and the first chamber so as to apply hydraulic pressure thereto. A second chamber is disposed in the path intermediate the first chamber and the interface piston and includes a check valve in the path intermediate the second chamber and the first chamber. A third chamber, includes a fluid intensifier piston having a head end and a tail end, the head end being mounted for reciprocation in the third chamber and the tail end being mounted for reciprocation in the second chamber. The head end of the intensifier piston has a larger diameter than the tail end and is exposed to gas pressure while the tail end is exposed, in the second chamber, to hydraulic pressure.