Abstract: A heated substrate support plate for use in a process chamber. The support plate has grooves disposed therein for receiving heating elements. The heating elements are comprised of an outer sheath, a heater coil and a heat-conducting filler material. The heating element is disposed within a groove and compressed to compact the heat-conducting filler material about the heater coil.

Abstract: This invention relates to the area of microelectromechanical systems in which electronic circuits and mechanical devices are integrated on the same silicon chip. The method taught herein allows the fabrication of thin film structures in excess of 150 microns in height using thin film deposition processes. Wafers may be employed as reusable molds for efficient production of such structures.

Abstract: An electro-optic palm scanner system employing a non-planar platen for obtaining high quality palmprints and heelprints. The platen includes an upper contact surface having a convex portion for contacting a palm to be imaged, and a planar portion for contacting the heel of the hand. The imaging system includes an optical carriage movably secured to a frame. The carriage supports a light source, lens system, and light detector. Total internal reflection occurs when light is incident on the platen at an angle greater than a critical angle of the platen, providing identifying information. The detector may include a linear CCD array which detects ridges and valleys in the hand to obtain image data. The image data is processed and the corresponding print of the heel or hand may be displayed on a video screen, and stored. The images of the palm and heel may be merged to form a single image.

Abstract: Methods and apparatus for magnetic resonance imaging (MRI) assisted cryosurgery. Optimal probe placements and cooling parameters are calculated prior to cryosurgery using MRI data. A MRI compatible cryoprobe and a stereotactic probe positioning device are provided. The resolution of MR images is enhanced by mounting a radio frequency MR coil on the intracorporeal end of a cryoprobe. During cryosurgery the temperature distribution in the frozen region is solved by determining the boundary of the frozen region and solving the heat equation for the known boundary conditions. During cryosurgery the temperature distribution in the unfrozen region is determined by T1 measurements. The process of freezing is controled using information from the solution of the energy equation in the frozen region and temperature measurements in the unfrozen region. After cryosurgery the extent of the tissue damage may be ascertained using phosphorus-31 and/or sodium-23 spectroscopy with a special coil set on the cryosurgical probe.