Patents Represented by Attorney William J. Robertson

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  • Method for cleaning wheels of car for semiconductor device manufacturing
    Patent number: 5849096
    Abstract: A method for cleaning the wheels of a car used in a semiconductor manufacturing plant uses a pair of endless belts that carry a dust trapping material on their outer surfaces. The car is located with a wheel supported by two rollers that each carry one of the belts. One of the rollers is turned and as the wheel rides in a gap between the two belts it turns with the first belt and transfers a turning motion to the other belt. As the wheel turns with the belts, dust on the wheel is transferred to the belts.
    Type: Grant
    Filed: June 24, 1996
    Date of Patent: December 15, 1998
    Assignee: Taiwan Semiconductor Manufacturing Company Ltd.
    Inventors: Nick Chang, Chung-Yea Lee