Abstract: An ultraviolet light emitting diode array of aluminum nitride grown on a sapphire substrate is fabricated by sputtering a preliminary layer of aluminum nitride onto a sapphire substrate, then placing said coated substrate in contact with a source of aluminum nitride and heating said composite in a particular atmosphere, resulting in the deposition of layers of aluminum nitride onto said coated substrate.
Type:
Grant
Filed:
November 4, 1976
Date of Patent:
June 20, 1978
Assignee:
The United States of America as represented by the Secretary of the Air Force