Patents Represented by Attorney Youge & Thompson
  • Patent number: 7057694
    Abstract: A method for cleaning a hole in a layered structure having a planarized transparent organic surface comprises the step of exposing said hole to sputtered particles or plasma particles in the presence of a transparent protection layer which covers said planarized transparent organic surface, except within said hole, for protecting said planarized transparent organic surface from said particles.
    Type: Grant
    Filed: October 2, 2003
    Date of Patent: June 6, 2006
    Assignee: NEC Corporation
    Inventor: Kunihiro Shiota