Patents Assigned to 3-Squared Semiconductor Corp.
  • Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature
    Patent number: 6434327
    Abstract: A rapid thermal heating apparatus including a plurality of radiant energy sources and reflectors associated with the radiant energy sources. The radiant energy sources and reflectors direct radiation through a window of an envacuable chamber to radiate regions of a substrate in the chamber with a pattern of radiation intensity.
    Type: Grant
    Filed: July 28, 1995
    Date of Patent: August 13, 2002
    Assignees: Applied Materials, Inc., 3-Squared Semiconductor Corp.
    Inventors: Christian M. Gronet, James F. Gibbons