Abstract: Multilayer metallo-dielectric energy control coatings are disclosed in which one or more layers are formed from a hydrogenated metal nitride dielectric, which may be hydrogenated during or after dielectric deposition. Properties of the multilayer coating may be configured by appropriately tuning the hydrogen concentration (and/or the spatial profile thereof) in one or more hydrogenated metal nitride dielectric layers. One or more metal layers of the multilayer coating may be formed on a hydrogenated nitride dielectric layer, thereby facilitating adhesion of the metal with a low percolation threshold and enabling the formation of thin metal layers that exhibit substantial transparency in the visible spectrum. Optical properties of the coating may be tuned through modulation of metal-dielectric interface roughness and dispersion of metal nanoparticles in the dielectric layer.
Type:
Grant
Filed:
April 17, 2018
Date of Patent:
October 18, 2022
Assignee:
3E NANO INC.
Inventors:
Nazir Pyarali Kherani, Sai Shankar Balakrishnan, Stepan Olegovich Fomichev, Yufeng Ye, Remy Howard Haoching Ko, Daniel P. Shea