Abstract: In an apparatus for surface analysis microscopy, a number of analysis device are mounted on an ultra-high vacuum chamber. The devices include a beam source of locally heating a selected region of a specimen and a temperature-detector for monitoring the heating of the selected region, as well as an electron gun and an analyzer for detecting emission from a specimen region subjected to electron bombardment. An ion gun may also be provided. The apparatus enables thermal microscopy of a specimen to be carried out in conjunction with other surface analysis techniques including, inter alia, scanning electron microscopy and Auger electron microscopy, within a single apparatus and during a single experimental operation. A novel configuration of cylindrical mirror analyser facilitates mounting a multiplicity of analysis devices on the chamber in a compact manner for studying a specimen at a single position.