Abstract: The invention provides a servo valve which is operable in vacuum systems and can be switched between an open and a closed state even by use of low forces. For that purpose, the valve has a closure member (4) moving between the open and a closed position under influence of a difference between a control pressure of a control chamber (13) and the pressures of the intake (2) and outlet (3), respectively. The control chamber is in constant fluid communication with the intake, and in adjustable fluid communication with the outlet to influence the control pressure mainly by the intake pressure and the outlet pressure depending on the adjustable fluid communication. The invention further provides a vacuum system with such a servo valve.

Abstract: The present invention relates to a method for pressure proof and tight assembling of a component to a wall of a house. The method is applicable for assembling components which are sensitive to high temperatures, e.g. for assembling an electronic pressure sensor in a house. According to the invention is component and the house is assembled via a sealing member, e.g. a sleeve, which is pressed into an opening between the component and the house until the yield point is exceeded for at least one of the component, the house and the sealing member.

Abstract: The invention provides a pressure sensor with a housing for a pressure sensing arrangement, e.g. a semi-conductor arrangement. The housing consists of a bottom part and an intermediate member with a through hole forming a sidewall of a cavity for the pressure sensing arrangement. A membrane is attached to the intermediate member to cover an opening of the cavity, and to allow pressure from outside to propagate into a pressure transmitting medium contained inside the housing and thus to the pressure sensing arrangement therein. The invention also provides a method of making a pressure sensor with a housing of the above-described kind.