Abstract: A method of measuring with which it is possible to measure with a high accuracy a gas introducing hole provided in an electrode for a plasma etching device, and to provide an electrode provided with a highly-accurate gas introducing hole is described. This method is provided to penetrate through in the thickness direction of a base material of the electrode for the plasma etching device, provided with: a step of radiating light toward the gas introducing hole from one surface side of the substrate; a step of acquiring a two-dimensional image of light which has passed through the gas introducing hole to the other surface side of the substrate; and a step of measuring at least one of the diameter, the inner wall surface roughness, and the degree of verticality of the gas introducing hole, on the basis of the two dimensional image.

Abstract: A method of measuring with which it is possible to measure with a high accuracy a gas introducing hole provided in an electrode for a plasma etching device, and to provide an electrode provided with a highly-accurate gas introducing hole is described. This method is provided to penetrate through in the thickness direction of a base material of the electrode for the plasma etching device, provided with: a step of radiating light toward the gas introducing hole from one surface side of the substrate; a step of acquiring a two-dimensional image of light which has passed through the gas introducing hole to the other surface side of the substrate; and a step of measuring at least one of the diameter, the inner wall surface roughness, and the degree of verticality of the gas introducing hole, on the basis of the two dimensional image.

Abstract: Methods are disclosed for using an RFID tag associated with a component, and for organizing and storing data on the RFID tag in a user selected format. The selected data format may be recorded or stored remote to the tag, with a data format name. The data format name may be stored on the RFID tag, such that a tag interrogator retrieving the data format name from the tag may thereafter retrieve and/or load the corresponding data format to properly parse and interpret the data stored on the tag, in that format. Thereby, a customized data format may be used, while the data format need not be provided on the tag. The methods also include providing more than one data format on a particular tag, such as where each data format is defined by a corresponding user of a particular portion of the tag. Thereby, a tag may include multiple formats to meet the data storage needs of multiple users of a tag. Methods are also included to improve or maximize effective utilization of the available memory on an RFID tag.