Patents Assigned to Accord SEG, Inc.
  • Semiconductor wafer support platform
    Patent number: 5800623
    Abstract: Premature equipment failure of susceptors used during plasma processing of semiconductor wafers is avoided by making the holes, characteristic of susceptors, such that the hole diameter is less that the susceptor thickness. In one embodiment, the susceptor includes a pattern of support struts which permits the planar top plate of the susceptor to be made quite thin and yet permits the diameter-to-thickness requirement to be met by aligning the pattern of holes with the pattern of support struts and having the holes penetrate the struts.
    Type: Grant
    Filed: July 18, 1996
    Date of Patent: September 1, 1998
    Assignee: Accord SEG, Inc.
    Inventor: Timothy Scott Dyer