Abstract: An auto-focus method for focusing an optical arrangement of a sub-micron optical system. The optical system includes a head, at least part of the optical arrangement being mechanically connected to the head. The optical arrangement is configured for reading from or writing to a surface of a medium. The head performs a scanning motion relative to the surface. The method includes illuminating at least part of a first viewing region of the surface by the optical arrangement while performing a focus range measurement of a second viewing region of the surface. The method also includes providing relative movement between the medium and the head in order for the optical arrangement to illuminate at least part of the second viewing region. The method additionally includes adjusting the focus of the optical arrangement based upon the focus range measurement.

Abstract: A method for inspecting a repeating pattern of a sample for defects. The repeating pattern has a translation vector, which defines a separation of substantially identical sections of the repeating pattern. The repeating pattern has a first section and a second section which are separated substantially by the translation vector. The method includes comparing the first section and the second section to identify a discrepancy indicative of a possible defect. The method also includes analyzing a reference data source in order to identify if the defect exists, and when the defect exists, in which one of the first section and the second section the defect exists. The reference data source is derived from a source exogenous to the sample.

Abstract: A scanning system for use in inspecting or writing on a substrate minimizes vibrations by applying movement-actuating forces directly between a carriage and a countermass which are both free to move along parallel tracks. Forces for decelerating and accelerating the scanning carriage are preferably applied along a minor part of a length of movement of the carriage. The carriage is then isolated from forces applied parallel to the track while moving along a major part of its length of movement. As a result, the carriage travels smoothly with approximately uniform speed during it's operative pass, without suffering from vibrations introduced by direct closed-loop feedback control.

Abstract: An image sensor, comprising a substrate and an array of at least twenty radiation sensing regions disposed on the substrate. The sensing regions only have non-sensing regions therebetween. Each sensing region has a maximum dimension which is less than 50 microns. A spacing of the radiation sensing regions is at least 5 times the maximum dimension.

Abstract: A scanning system for scanning the surface of a sample. The system includes a scanning head, a mounting arrangement configured for mounting the sample thereon, a drive mechanism configured for providing relative motion between the scanning head and the mounting arrangement, an optical system and an adjustment mechanism. At least part of the optical system is included in the scanning head. The optical system is configured for simultaneously reading from at least two non-overlapping viewing regions of the surface. The adjustment mechanism is configured for adjusting at least part of the optical system so as to vary a spacing of the at least two non-overlapping viewing regions read by the optical system.

Abstract: A confocal microscope with diffractively formed virtual pinhole array includes a laser light source configuration configured to generate a beam of parallel light and a diffractive optical element deployed in a path of the beam. The diffractive optical element is configured to generate a virtual pinhole array in which a plurality of small spots are formed in a focal plane. A confocal microscope assembly is deployed with its illumination plane coincident with the virtual pinhole array.