Abstract: A low pressure carburization process for metal alloy parts uses a fuel mixture consisting of hydrogen with 2 to 60% by volume ethylene. The fuel mixture is heated to a temperature between 820.degree. and 1100.degree. C. A furnace installation for carrying out the process includes a double vacuum tank or vessel arrangement with internal carburizing gas distribution, an annular space surrounding the vessel, a cover, thermocouples and a microcomputer control arrangement.