Patents Assigned to ACORN SEMI, LLC
  • Patent number: 11843040
    Abstract: An electrical contact structure (an MIS contact) includes one or more conductors (M-Layer), a semiconductor (S-Layer), and an interfacial dielectric layer (I-Layer) of less than 4 nm thickness disposed between and in contact with both the M-Layer and the S-Layer. The I-Layer is an oxide of a metal or a semiconductor. The conductor of the M-Layer that is adjacent to and in direct contact with the I-Layer is a metal oxide that is electrically conductive, chemically stable and unreactive at its interface with the I-Layer at temperatures up to 450° C. The electrical contact structure has a specific contact resistivity of less than or equal to approximately 10?5-10?7 ?-cm2 when the doping in the semiconductor adjacent the MIS contact is greater than approximately 2×1019 cm?3 and less than approximately 10?8 ?-cm2 when the doping in the semiconductor adjacent the MIS contact is greater than approximately 1020 cm?3.
    Type: Grant
    Filed: November 10, 2020
    Date of Patent: December 12, 2023
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, Andreas Goebel
  • Patent number: 11804533
    Abstract: Techniques for reducing the specific contact resistance of metal-semiconductor (group IV) junctions by interposing a monolayer of group V or group III atoms at the interface between the metal and the semiconductor, or interposing a bi-layer made of one monolayer of each, or interposing multiple such bi-layers. The resulting low specific resistance metal-group IV semiconductor junctions find application as a low resistance electrode in semiconductor devices including electronic devices (e.g., transistors, diodes, etc.) and optoelectronic devices (e.g., lasers, solar cells, photodetectors, etc.) and/or as a metal source and/or drain region (or a portion thereof) in a field effect transistor (FET). The monolayers of group III and group V atoms are predominantly ordered layers of atoms formed on the surface of the group IV semiconductor and chemically bonded to the surface atoms of the group IV semiconductor.
    Type: Grant
    Filed: February 23, 2023
    Date of Patent: October 31, 2023
    Assignee: Acorn Semi, LLC
    Inventors: Walter A. Harrison, Paul A. Clifton, Andreas Goebel, R. Stockton Gaines
  • Patent number: 11791411
    Abstract: A semiconductor structure includes a layer arrangement consisting of, in sequence, a semiconductor-on-insulator layer (SOI) over a buried oxide (BOX) layer over a buried stressor (BS) layer with a silicon bonding layer (BL) intervening between the BOX and the BS layers. The semiconductor structure may be created by forming the BS layer on a substrate of a first wafer; growing the BL layer at the surface of the BS layer; wafer bonding the first wafer to a second wafer having a silicon oxide layer formed on a silicon substrate such that the silicon oxide layer of the second wafer is bonded to the BL layer of the first wafer, and thereafter removing a portion of the silicon substrate of the second wafer.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: October 17, 2023
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, Andreas Goebel
  • Patent number: 11610974
    Abstract: Techniques for reducing the specific contact resistance of metal-semiconductor (group IV) junctions by interposing a monolayer of group V or group III atoms at the interface between the metal and the semiconductor, or interposing a bi-layer made of one monolayer of each, or interposing multiple such bi-layers. The resulting low specific resistance metal-group IV semiconductor junctions find application as a low resistance electrode in semiconductor devices including electronic devices (e.g., transistors, diodes, etc.) and optoelectronic devices (e.g., lasers, solar cells, photodetectors, etc.) and/or as a metal source and/or drain region (or a portion thereof) in a field effect transistor (FET). The monolayers of group III and group V atoms are predominantly ordered layers of atoms formed on the surface of the group IV semiconductor and chemically bonded to the surface atoms of the group IV semiconductor.
    Type: Grant
    Filed: December 23, 2020
    Date of Patent: March 21, 2023
    Assignee: Acorn Semi, LLC
    Inventors: Walter A. Harrison, Paul A. Clifton, Andreas Goebel, R. Stockton Gaines
  • Patent number: 11476364
    Abstract: An SOI wafer contains a compressively stressed buried insulator structure. In one example, the stressed buried insulator (BOX) may be formed on a host wafer by forming silicon oxide, silicon nitride and silicon oxide layers so that the silicon nitride layer is compressively stressed. Wafer bonding provides the surface silicon layer over the stressed insulator layer. Preferred implementations of the invention form MOS transistors by etching isolation trenches into a preferred SOI substrate having a stressed BOX structure to define transistor active areas on the surface of the SOI substrate. Most preferably the trenches are formed deep enough to penetrate through the stressed BOX structure and some distance into the underlying silicon portion of the substrate. The overlying silicon active regions will have tensile stress induced due to elastic edge relaxation.
    Type: Grant
    Filed: March 15, 2021
    Date of Patent: October 18, 2022
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, R. Stockton Gaines
  • Patent number: 11462643
    Abstract: A nanowire transistor includes undoped source and drain regions electrically coupled with a channel region. A source stack that is electrically isolated from a gate conductor includes an interfacial layer and a source conductor, and is coaxially wrapped completely around the source region, extending along at least a portion of the source region. A Schottky barrier between the source conductor and the source region is a negative Schottky barrier and a concentration of free charge carriers is induced in the semiconductor source region.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: October 4, 2022
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, Andreas Goebel, Walter A. Harrison
  • Patent number: 11355613
    Abstract: An electrical device in which an interface layer is disposed in between and in contact with a conductor and a semiconductor.
    Type: Grant
    Filed: June 14, 2021
    Date of Patent: June 7, 2022
    Assignee: Acorn Semi, LLC
    Inventors: Daniel E. Grupp, Daniel J. Connelly
  • Patent number: 11322615
    Abstract: A semiconductor structure includes a layer arrangement consisting of, in sequence, a semiconductor-on-insulator layer (SOI) over a buried oxide (BOX) layer over a buried stressor (BS) layer with a silicon bonding layer (BL) intervening between the BOX and the BS layers. The semiconductor structure may be created by forming the BS layer on a substrate of a first wafer; growing the BL layer at the surface of the BS layer; wafer bonding the first wafer to a second wafer having a silicon oxide layer formed on a silicon substrate such that the silicon oxide layer of the second wafer is bonded to the BL layer of the first wafer, and thereafter removing a portion of the silicon substrate of the second wafer.
    Type: Grant
    Filed: November 4, 2020
    Date of Patent: May 3, 2022
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, Andreas Goebel
  • Patent number: 11271370
    Abstract: Tensile strained germanium is provided that can be sufficiently strained to provide a nearly direct band gap material or a direct band gap material. Compressively stressed or tensile stressed stressor materials in contact with germanium regions induce uniaxial or biaxial tensile strain in the germanium regions. Stressor materials may include silicon nitride or silicon germanium. The resulting strained germanium structure can be used to emit or detect photons including, for example, generating photons within a resonant cavity to provide a laser.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: March 8, 2022
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, Andreas Goebel, R. Stockton Gaines
  • Patent number: 11056569
    Abstract: An electrical device in which an interface layer is disposed in between and in contact with a conductor and a semiconductor.
    Type: Grant
    Filed: July 9, 2019
    Date of Patent: July 6, 2021
    Assignee: Acorn Semi, LLC
    Inventors: Daniel E. Grupp, Daniel J. Connelly
  • Patent number: 11043571
    Abstract: A transistor having at least one passivated Schottky barrier to a channel includes an insulated gate structure on a p-type substrate in which the channel is located beneath the insulated gate structure. The channel and the insulated gate structure define a first and second undercut void regions that extend underneath the insulated gate structure toward the channel from a first and a second side of the insulated gate structure, respectively. A passivation layer is included on at least one exposed sidewall surface of the channel and metal source and drain terminals are located on respective first and second sides of the channel, including on the passivation layer and within the undercut void regions beneath the insulated gate structure. At least one of the metal source and drain terminals comprises a metal that has a work function near a valence band of the p-type substrate.
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: June 22, 2021
    Assignee: ACORN SEMI, LLC
    Inventors: Daniel E. Grupp, Daniel J. Connelly
  • Patent number: 11018237
    Abstract: An electrical device in which an interface layer is disposed in between and in contact with a conductor and a semiconductor.
    Type: Grant
    Filed: April 14, 2020
    Date of Patent: May 25, 2021
    Assignee: Acorn Semi, LLC
    Inventors: Daniel E. Grupp, Daniel J. Connelly
  • Patent number: 10950707
    Abstract: An electrical device in which an interface layer is disposed in between and in contact with a conductor and a semiconductor.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: March 16, 2021
    Assignee: Acorn Semi, LLC
    Inventors: Daniel E. Grupp, Daniel J. Connelly
  • Patent number: 10950727
    Abstract: An SOI wafer contains a compressively stressed buried insulator structure. In one example, the stressed buried insulator (BOX) may be formed on a host wafer by forming silicon oxide, silicon nitride and silicon oxide layers so that the silicon nitride layer is compressively stressed. Wafer bonding provides the surface silicon layer over the stressed insulator layer. Preferred implementations of the invention form MOS transistors by etching isolation trenches into a preferred SOI substrate having a stressed BOX structure to define transistor active areas on the surface of the SOI substrate. Most preferably the trenches are formed deep enough to penetrate through the stressed BOX structure and some distance into the underlying silicon portion of the substrate. The overlying silicon active regions will have tensile stress induced due to elastic edge relaxation.
    Type: Grant
    Filed: February 4, 2020
    Date of Patent: March 16, 2021
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, R. Stockton Gaines
  • Patent number: 10937880
    Abstract: An electrical device in which an interface layer is disposed in between and in contact with a conductor and a semiconductor.
    Type: Grant
    Filed: May 12, 2020
    Date of Patent: March 2, 2021
    Assignee: Acorn Semi, LLC
    Inventors: Daniel E. Grupp, Daniel J. Connelly
  • Patent number: 10879366
    Abstract: Techniques for reducing the specific contact resistance of metal—semiconductor (group IV) junctions by interposing a monolayer of group V or group III atoms at the interface between the metal and the semiconductor, or interposing a bi-layer made of one monolayer of each, or interposing multiple such bi-layers. The resulting low specific resistance metal—group IV semiconductor junctions find application as a low resistance electrode in semiconductor devices including electronic devices (e.g., transistors, diodes, etc.) and optoelectronic devices (e.g., lasers, solar cells, photodetectors, etc.) and/or as a metal source and/or drain region (or a portion thereof) in a field effect transistor (FET). The monolayers of group III and group V atoms are predominantly ordered layers of atoms formed on the surface of the group IV semiconductor and chemically bonded to the surface atoms of the group IV semiconductor.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: December 29, 2020
    Assignee: Acorn Semi, LLC
    Inventors: Walter A. Harrison, Paul A. Clifton, Andreas Goebel, R. Stockton Gaines
  • Patent number: 10872964
    Abstract: An electrical contact structure (an MIS contact) includes one or more conductors (M-Layer), a semiconductor (S-Layer), and an interfacial dielectric layer (I-Layer) of less than 4 nm thickness disposed between and in contact with both the M-Layer and the S-Layer. The I-Layer is an oxide of a metal or a semiconductor. The conductor of the M-Layer that is adjacent to and in direct contact with the I-Layer is a metal oxide that is electrically conductive, chemically stable and unreactive at its interface with the I-Layer at temperatures up to 450° C. The electrical contact structure has a specific contact resistivity of less than or equal to approximately 10?5-10?7 ?-cm2 when the doping in the semiconductor adjacent the MIS contact is greater than approximately 2×1019 cm?3 and less than approximately 10?8 ?-cm2 when the doping in the semiconductor adjacent the MIS contact is greater than approximately 1020 cm?3.
    Type: Grant
    Filed: January 14, 2020
    Date of Patent: December 22, 2020
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, Andreas Goebel
  • Patent number: 10833194
    Abstract: A semiconductor structure includes a layer arrangement consisting of, in sequence, a semiconductor-on-insulator layer (SOI) over a buried oxide (BOX) layer over a buried stressor (BS) layer with a silicon bonding layer (BL) intervening between the BOX and the BS layers. The semiconductor structure may be created by forming the BS layer on a substrate of a first wafer; growing the BL layer at the surface of the BS layer; wafer bonding the first wafer to a second wafer having a silicon oxide layer formed on a silicon substrate such that the silicon oxide layer of the second wafer is bonded to the BL layer of the first wafer, and thereafter removing a portion of the silicon substrate of the second wafer.
    Type: Grant
    Filed: February 22, 2019
    Date of Patent: November 10, 2020
    Assignee: ACORN SEMI, LLC
    Inventors: Paul A. Clifton, Andreas Goebel
  • Patent number: 10833199
    Abstract: A nanowire transistor includes undoped source and drain regions electrically coupled with a channel region. A source stack that is electrically isolated from a gate conductor includes an interfacial layer and a source conductor, and is coaxially wrapped completely around the source region, extending along at least a portion of the source region. A Schottky barrier between the source conductor and the source region is a negative Schottky barrier and a concentration of free charge carriers is induced in the semiconductor source region.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: November 10, 2020
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, Andreas Goebel, Walter A. Harrison
  • Patent number: 10727647
    Abstract: Tensile strained germanium is provided that can be sufficiently strained to provide a nearly direct band gap material or a direct band gap material. Compressively stressed or tensile stressed stressor materials in contact with germanium regions induce uniaxial or biaxial tensile strain in the germanium regions. Stressor materials may include silicon nitride or silicon germanium. The resulting strained germanium structure can be used to emit or detect photons including, for example, generating photons within a resonant cavity to provide a laser.
    Type: Grant
    Filed: December 7, 2018
    Date of Patent: July 28, 2020
    Assignee: Acorn Semi, LLC
    Inventors: Paul A. Clifton, Andreas Goebel, R. Stockton Gaines