Patents Assigned to ACT Advanced Circuit Testing Gesellschaft
  • Electrostatic-magnetic lens arrangement
    Patent number: 5780859
    Abstract: An electrostatic-magnetic lens arrangement is for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single-pole lens.
    Type: Grant
    Filed: January 29, 1997
    Date of Patent: July 14, 1998
    Assignee: ACT Advanced Circuit Testing Gesellschaft
    Inventors: Hans-Peter Feuerbaum, Jurgen Frosien, Koshi Ueda, Toshimichi Iwai, Gerald Schonecker