Patents Assigned to ACT Advanced Circuit Testing Gesellschaft
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Patent number: 6051838Abstract: An optical unit having an electrostatic lens for influencing a particle beam wherein the lens has at least one first and one second electrode downstream of one another in the direction of the particle beam, each of the electrodes being chargeable with a potential and in electrical contact with a high-resistance body having a channel therethrough for the particle beam. A further component is provided for influencing the particle beam in the region of the electrostatic lens.Type: GrantFiled: October 8, 1997Date of Patent: April 18, 2000Assignee: ACT Advanced Circuit Testing Gesellschaft fur TestsystementwicklungInventors: Jurgen Frosien, Stefan Lanio, Reinhold Schmitt, Gerald Schonecker
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Patent number: 5895917Abstract: The invention relates to a detector objective lens and a charged particle am device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) disposed in front of the magnetic lens (60) in the direction of the charged particle beam (2) for detecting the charged particles released at the specimen (8). An additional lens is provided for influencing the released charged particles, which generates an electrostatic and/or magnetic field and is disposed between the main lens and the detector, the fields of the main lens and said additional lens being substantially separated from each other.Type: GrantFiled: June 18, 1997Date of Patent: April 20, 1999Assignee: ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbHInventors: Koshi Ueda, Toshimichi Iwai, Gerald Schonecker, Jurgen Frosien
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Patent number: 5885354Abstract: The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.Type: GrantFiled: December 9, 1996Date of Patent: March 23, 1999Assignee: ACT Advanced Circuit Testing Gesellschaft Fur Testsystement-Wicklung mbHInventors: Jurgen Frosien, Dieter Winkler, Hans Zimmermann
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Patent number: 5847399Abstract: A deflection system (6) for a charged particle beam (2), in particular for rrangement in an objective lens for a charged particle beam device with a deflection means (60) for generating a magnetic field acting on the charged particle beam (2) and a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic field. The shield (61) consists, transversely to the direction of the charged particle beam (2), of at least one soft magnetic layer which is preferably formed as a strip material and rolled up to a cylinder together with an electrically insulating layer.Type: GrantFiled: June 16, 1997Date of Patent: December 8, 1998Assignee: ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbHInventors: Reinhold Schmitt, Stefan Lanio, Thomas Jasinski
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Patent number: 5808309Abstract: The invention relates to apparatus for generating an electron beam with an ptical waveguide, a light source which is coupled on one end of the optical waveguide, a coating for generated electrons which is applied to the other end of the optical waveguide as well as field-generating means in order to lower the electron work function of the coating so far that a photoemission current can be generated. According to the invention a metal carbide is used as the coating.Type: GrantFiled: September 17, 1997Date of Patent: September 15, 1998Assignee: ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbHInventors: Rainer Spehr, Michael Schmitt, Jurgen Frosien
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Patent number: 5780859Abstract: An electrostatic-magnetic lens arrangement is for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single-pole lens.Type: GrantFiled: January 29, 1997Date of Patent: July 14, 1998Assignee: ACT Advanced Circuit Testing GesellschaftInventors: Hans-Peter Feuerbaum, Jurgen Frosien, Koshi Ueda, Toshimichi Iwai, Gerald Schonecker
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Patent number: 5637538Abstract: The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of the corpuscular beam a chemical reaction takes place on the area to be processed. The processing speed can be markedly increased by the use of a magnetic field in the region of the probe.Type: GrantFiled: November 21, 1994Date of Patent: June 10, 1997Assignee: Act Advanced Circuit Testing Gesellschaft FurInventors: Jurgen Frosien, Dieter Winkler, Hans Zimmermann