Abstract: An optical unit having an electrostatic lens for influencing a particle beam wherein the lens has at least one first and one second electrode downstream of one another in the direction of the particle beam, each of the electrodes being chargeable with a potential and in electrical contact with a high-resistance body having a channel therethrough for the particle beam. A further component is provided for influencing the particle beam in the region of the electrostatic lens.
Type:
Grant
Filed:
October 8, 1997
Date of Patent:
April 18, 2000
Assignee:
ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung
Inventors:
Jurgen Frosien, Stefan Lanio, Reinhold Schmitt, Gerald Schonecker
Abstract: The invention relates to a detector objective lens and a charged particle am device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) disposed in front of the magnetic lens (60) in the direction of the charged particle beam (2) for detecting the charged particles released at the specimen (8). An additional lens is provided for influencing the released charged particles, which generates an electrostatic and/or magnetic field and is disposed between the main lens and the detector, the fields of the main lens and said additional lens being substantially separated from each other.
Type:
Grant
Filed:
June 18, 1997
Date of Patent:
April 20, 1999
Assignee:
ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbH
Abstract: A deflection system (6) for a charged particle beam (2), in particular for rrangement in an objective lens for a charged particle beam device with a deflection means (60) for generating a magnetic field acting on the charged particle beam (2) and a shield (61) for avoiding eddy currents, which surrounds the deflection means and guides the formed outer magnetic field. The shield (61) consists, transversely to the direction of the charged particle beam (2), of at least one soft magnetic layer which is preferably formed as a strip material and rolled up to a cylinder together with an electrically insulating layer.
Type:
Grant
Filed:
June 16, 1997
Date of Patent:
December 8, 1998
Assignee:
ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbH
Inventors:
Reinhold Schmitt, Stefan Lanio, Thomas Jasinski
Abstract: The invention relates to apparatus for generating an electron beam with an ptical waveguide, a light source which is coupled on one end of the optical waveguide, a coating for generated electrons which is applied to the other end of the optical waveguide as well as field-generating means in order to lower the electron work function of the coating so far that a photoemission current can be generated. According to the invention a metal carbide is used as the coating.
Type:
Grant
Filed:
September 17, 1997
Date of Patent:
September 15, 1998
Assignee:
ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbH
Inventors:
Rainer Spehr, Michael Schmitt, Jurgen Frosien