Patents Assigned to Active Layer Parametrics, Inc.
  • Methods and apparatus for test pattern forming and film property measurement
    Patent number: 11699622
    Abstract: A method for electrically characterizing a layer disposed on a substrate and electrically insulated from the substrate is disclosed. The method can include forming a test pattern, contacting the test pattern with electrical contact elements at contact regions, and measuring an electrical parameter of the layer by passing a first set of test currents between contact regions. The test pattern can be formed by pushing a pattern forming head against a top surface of the layer, introducing a first fluid into the cavity, and converting the sacrificial portion of the layer into an insulator using the first fluid and forming the test pattern under the test-pattern-shaped inner seal.
    Type: Grant
    Filed: March 25, 2022
    Date of Patent: July 11, 2023
    Assignee: Active Layer Parametrics, Inc.
    Inventors: Bulent Mehmet Basol, Jalal Ashjaee, Abhijeet Joshi
  • Methods and apparatus for test pattern forming and film property measurement
    Patent number: 11289386
    Abstract: A method for electrically characterizing a layer disposed on a substrate and electrically insulated from the substrate is disclosed. The method can include forming a test pattern, contacting the test pattern with electrical contact elements at contact regions, and measuring an electrical parameter of the layer by passing a first set of test currents between contact regions. The test pattern can be formed by pushing a pattern forming head against a top surface of the layer, introducing a first fluid into the cavity, and converting the sacrificial portion of the layer into an insulator using the first fluid and forming the test pattern under the test-pattern-shaped inner seal.
    Type: Grant
    Filed: March 16, 2020
    Date of Patent: March 29, 2022
    Assignee: Active Layer Parametrics, Inc.
    Inventors: Bulent Mehmet Basol, Jalal Ashjaee, Abhijeet Joshi
  • Methods and systems for material property profiling of thin films
    Patent number: 10790203
    Abstract: Methods, tools and systems for full characterization of thin and ultra-thin layers employed in advanced semiconductor device structures are disclosed.
    Type: Grant
    Filed: April 25, 2017
    Date of Patent: September 29, 2020
    Assignee: Active Layer Parametrics, Inc.
    Inventors: Bulent M. Basol, Abhijeet Joshi, Jalal Ashjaee
  • METHODS AND SYSTEMS FOR MATERIAL PROPERTY PROFILING OF THIN FILMS
    Publication number: 20190148248
    Abstract: Methods, tools and systems for full characterization of thin and ultra-thin layers employed in advanced semiconductor device structures are disclosed.
    Type: Application
    Filed: April 25, 2017
    Publication date: May 16, 2019
    Applicant: Active Layer Parametrics, Inc.
    Inventors: Bulent M. BASOL, Abhijeet JOSHI, Jalal ASHJAEE